Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789374 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yusuke Hoshino, Yukio Watanabe, Atsushi Ueda, Koichiro Koge, Takayuki OSANAI +1 more | 2023-10-17 |
| 11452196 | EUV chamber apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method | Kouichiro Kouge, Yusuke Hoshino, Takashi Okada | 2022-09-20 |
| 11363706 | Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yutaka Shiraishi, Tsukasa HORI | 2022-06-14 |
| 11320740 | Target supply device, target supply method, and electronic device manufacturing method | Tsukasa HORI, Yutaka Shiraishi, Hiroshi Someya, Yukio Watanabe | 2022-05-03 |
| 11061340 | Mount, extreme ultraviolet light generation system, and device manufacturing method | — | 2021-07-13 |
| 10698316 | Target generation device replacement trolley, target generation device replacement system, and target generation device replacement method | — | 2020-06-30 |
| 10674590 | Tank, target generation device, and extreme-UV-light generation device | Toshiyuki Hirashita | 2020-06-02 |
| 10524343 | Extreme ultraviolet light generation apparatus | Takanobu Ishihara, Yutaka Shiraishi | 2019-12-31 |
| 10372041 | Target generation device and extreme ultraviolet light generation device | Yutaka Shiraishi | 2019-08-06 |
| 10349508 | Target storage device | Yutaka Shiraishi, Toshiyuki Hirashita, Takuya Ishii | 2019-07-09 |
| 10136510 | Extreme ultraviolet light generation device | Shinji Nagai, Georg Soumagne | 2018-11-20 |
| 10009991 | Target supply apparatus and EUV light generating apparatus | Yoshiaki Kato, Fumio Iwamoto | 2018-06-26 |
| 9429847 | Extreme ultraviolet light source apparatus | Yukio Watanabe, Osamu Wakabayashi, Kouji Kakizaki, Michio Shinozaki | 2016-08-30 |
| 9332625 | Extreme ultraviolet light source apparatus | Yukio Watanabe, Osamu Wakabayashi, Kouji Kakizaki, Michio Shinozaki | 2016-05-03 |
| 9233782 | Target supply device | Takanobu Ishihara, Hiroshi Someya, Osamu Wakabayashi | 2016-01-12 |
| 9052615 | Extreme ultraviolet light source apparatus | Yukio Watanabe, Osamu Wakabayashi, Kouji Kakizaki, Michio Shinozaki | 2015-06-09 |
| 9040943 | Chamber and extreme ultraviolet light generation apparatus | — | 2015-05-26 |
| 8872145 | Target supply device | Toshiyuki Hirashita | 2014-10-28 |
| 8785895 | Target supply apparatus, chamber, and extreme ultraviolet light generation apparatus | Hiroshi Umeda, Taku Yamazaki, Hakaru Mizoguchi | 2014-07-22 |
| 8779402 | Target supply device | Takayuki Yabu, Yukio Watanabe, Hiroshi Someya, Osamu Wakabayashi | 2014-07-15 |
| 8779401 | Target supply unit | Hakaru Mizoguchi, Takayuki Yabu | 2014-07-15 |
| 8759804 | Chamber apparatus and extreme ultraviolet light generation system | Yukio Watanabe, Tamotsu Abe, Osamu Wakabayashi | 2014-06-24 |
| 8698111 | Extreme ultraviolet light generation system | Yukio Watanabe, Osamu Wakabayashi, Hideo Hoshino | 2014-04-15 |
| 8324600 | Apparatus and method for measuring and controlling target trajectory in chamber apparatus | Hideyuki Hayashi, Tooru Abe, Kouji Kakizaki | 2012-12-04 |
| 8212228 | Extreme ultra violet light source apparatus | Tamotsu Abe, Hiroshi Someya, Masato Moriya, Takeshi Asayama, Hideo Hoshino +1 more | 2012-07-03 |