Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12284745 | Extreme ultraviolet light generation method, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yoshiyuki Honda, Hirokazu HOSODA | 2025-04-22 |
| 11452196 | EUV chamber apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method | Yusuke Hoshino, Toshihiro Nishisaka, Takashi Okada | 2022-09-20 |
| 10627287 | Thomson scattering measurement system and EUV light generation system | Tatsuya Yanagida | 2020-04-21 |