Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12284745 | Extreme ultraviolet light generation method, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yoshiyuki Honda, Kouichiro Kouge | 2025-04-22 |
| 11366390 | Extreme ultraviolet light generation system and electronic device manufacturing method | Takanari Kobayashi, Yoshiyuki Honda | 2022-06-21 |
| 11333981 | Target image capturing device and extreme ultraviolet light generation apparatus | — | 2022-05-17 |
| 11337293 | Extreme ultraviolet light generation system and electronic device manufacturing method | Takanari Kobayashi | 2022-05-17 |
| 10976664 | Target image capturing device and extreme ultraviolet light generation device | — | 2021-04-13 |
| 10420198 | Extreme ultraviolet light generating apparatus | Toru Suzuki | 2019-09-17 |
| 10271414 | Droplet detector and extreme ultraviolet light generating apparatus | Kouichi Satou, Takayuki Yabu, Yoshifumi Ueno | 2019-04-23 |
| 10209625 | Extreme ultraviolet light generating apparatus | — | 2019-02-19 |
| 10172224 | Extreme UV light generator | Takayuki Yabu, Takuya Ishii | 2019-01-01 |
| 10141186 | Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system | Takayuki Yabu, Hideo Hoshino | 2018-11-27 |
| 10126657 | Extreme ultraviolet light generating apparatus | Tamotsu Abe | 2018-11-13 |
| 10057972 | Extreme ultraviolet light generation system and method of generating extreme ultraviolet light | Yoshifumi Ueno, Takayuki Yabu | 2018-08-21 |
| 9942973 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Yoshifumi Ueno, Takashi Saito | 2018-04-10 |
| 9860967 | Target supply apparatus, extreme ultraviolet light generating apparatus, and target supply method | Tsukasa HORI | 2018-01-02 |