Issued Patents All Time
Showing 1–25 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332575 | Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Fumio Iwamoto, Atsushi Ueda | 2025-06-17 |
| 11924954 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yuta Takashima | 2024-03-05 |
| 11778721 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yuichi Nishimura, Hiroaki Nakarai | 2023-10-03 |
| 11553583 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yoshifumi Ueno | 2023-01-10 |
| 11219116 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yuta Takashima, Yuichi Nishimura, Yoshifumi Ueno | 2022-01-04 |
| 11043784 | Laser apparatus and EUV light generation system | Tsukasa HORI, Yoshifumi Ueno, Yoshiaki Kurosawa | 2021-06-22 |
| 10908429 | Extreme ultraviolet light generation system, laser beam size controlling method, and electronic device manufacturing method | Yuichi Nishimura | 2021-02-02 |
| 10869378 | Target measuring apparatus and extreme ultraviolet light generation apparatus | — | 2020-12-15 |
| 10842010 | Extreme ultraviolet light generation system | Osamu Wakabayashi | 2020-11-17 |
| 10609803 | Extreme ultraviolet (EUV) light generating apparatus and control method for centroid of EUV light | Yuichi Nishimura, Yoshifumi Ueno | 2020-03-31 |
| 10531550 | Extreme ultraviolet light generation device | — | 2020-01-07 |
| 10531551 | Extreme ultraviolet light generating apparatus | Yuichi Nishimura | 2020-01-07 |
| 10303061 | Extreme ultraviolet light generation device | Yuichi Nishimura, Yoshifumi Ueno | 2019-05-28 |
| 10271414 | Droplet detector and extreme ultraviolet light generating apparatus | Kouichi Satou, Yoshifumi Ueno, Hirokazu HOSODA | 2019-04-23 |
| 10251254 | Extreme ultraviolet light generating apparatus and control method for centroid of extreme ultraviolet light | Yuichi Nishimura | 2019-04-02 |
| 10225917 | Target supply device and extreme ultraviolet light generating device | Takahisa FUJIMAKI, Yuta Takashima, Fumio Iwamoto, Yutaka Shiraishi | 2019-03-05 |
| 10225918 | Extreme ultraviolet light generating apparatus | Yuichi Nishimura | 2019-03-05 |
| 10191381 | Extreme ultraviolet light generating device | — | 2019-01-29 |
| 10172224 | Extreme UV light generator | Hirokazu HOSODA, Takuya Ishii | 2019-01-01 |
| 10141186 | Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system | Hirokazu HOSODA, Hideo Hoshino | 2018-11-27 |
| 10102938 | Extreme ultraviolet light generating apparatus | Tamotsu Abe, Kenichi Miyao, Tooru Abe | 2018-10-16 |
| 10085334 | Extreme ultraviolet light generating system | — | 2018-09-25 |
| 10057972 | Extreme ultraviolet light generation system and method of generating extreme ultraviolet light | Yoshifumi Ueno, Hirokazu HOSODA | 2018-08-21 |
| 10054861 | Extreme ultraviolet light generating apparatus and method for generating extreme ultraviolet light | — | 2018-08-21 |
| 9949354 | Extreme UV light generation apparatus and method | Takashi Saito, Fumio Iwamoto, Osamu Wakabayashi | 2018-04-17 |