Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9686845 | Extreme ultraviolet light generation apparatus | Toru Suzuki | 2017-06-20 |
| 9661730 | Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target | Atsushi Ueda, Osamu Wakabayashi, Georg Soumagne, Takashi Saito | 2017-05-23 |
| 9647406 | Laser unit and extreme ultraviolet light generating system | Takashi Suganuma, Osamu Wakabayashi, Seiji Nogiwa | 2017-05-09 |
| 9439276 | Extreme ultraviolet light generating system | Takashi Saito, Osamu Wakabayashi | 2016-09-06 |
| 9310686 | Target supply device and target supply method | Tamotsu Abe | 2016-04-12 |
| 9097434 | Target supply apparatus and target supply method | Osamu Wakabayashi | 2015-08-04 |
| 8841639 | Control method for target supply device, and target supply device | Yoshifumi Ueno, Takeshi Kodama | 2014-09-23 |
| 8809819 | Target supply unit and extreme ultraviolet light generation apparatus | Hiroshi Umeda, Hakaru Mizoguchi | 2014-08-19 |
| 8779401 | Target supply unit | Hakaru Mizoguchi, Toshihiro Nishisaka | 2014-07-15 |
| 8779402 | Target supply device | Yukio Watanabe, Toshihiro Nishisaka, Hiroshi Someya, Osamu Wakabayashi | 2014-07-15 |
| 8710472 | Target output device and extreme ultraviolet light source apparatus | Takanobu Ishihara, Youichi Sasaki, Kouji Kakizaki, Masahiro Inoue, Hideo Hoshino | 2014-04-29 |
| 8698112 | Extreme ultraviolet light generation apparatus | Kouji Kakizaki, Takanobu Ishihara, Tamotsu Abe, Osamu Wakabayashi | 2014-04-15 |
| 8610095 | Extreme ultraviolet light source device | Takeshi Asayama, Fumika Yoshida, Osamu Wakabayashi | 2013-12-17 |
| 8604451 | Target supply apparatus | Masaki Nakano, Hitoshi Nagano, Takanobu Ishihara | 2013-12-10 |
| 8497489 | Chamber apparatus and method of maintaining target supply unit | Kouji Kakizaki, Yukio Watanabe, Osamu Wakabayashi | 2013-07-30 |
| 8450706 | Extreme ultraviolet light source apparatus | Tamotsu Abe, Hiroshi Someya, Takashi Suganuma | 2013-05-28 |
| 8343429 | Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the same | Takanobu Ishihara, Masaki Nakano | 2013-01-01 |
| 8294129 | Extreme ultraviolet light source apparatus | Masato Moriya, Tamotsu Abe, Takashi Suganuma, Hiroshi Someya, Akira Sumitani +1 more | 2012-10-23 |
| 8173984 | Extreme ultraviolet light source apparatus | Masato Moriya, Tamotsu Abe, Takashi Suganuma, Hiroshi Someya, Akira Sumitani +1 more | 2012-05-08 |
| 7923705 | Extreme ultra violet light source apparatus | Masato Moriya, Tamotsu Abe, Takashi Suganuma, Hiroshi Someya, Akira Sumitani +1 more | 2011-04-12 |
| 7903700 | Narrow-spectrum laser device | Shinji Nagai, Osamu Wakabayashi, Koji Kakizaki, Takahito Kumazaki | 2011-03-08 |
| 7732794 | Extreme ultra violet light source apparatus | Tamotsu Abe, Yoshifumi Ueno | 2010-06-08 |
| 7683355 | Extreme ultra violet light source apparatus | Masato Moriya, Tamotsu Abe, Takashi Suganuma, Hiroshi Someya, Akira Sumitani | 2010-03-23 |
| 7006546 | Gas laser electrode, laser chamber employing the electrode, and gas laser device | Tsukasa HORI, Junichi Fujimoto | 2006-02-28 |
| 6810061 | Discharge electrode and discharge electrode manufacturing method | Tsukasa HORI, Akira Sumitani, Teiichirou Chiba, Hakaru Mizoguchi, Osamu Wakabayashi +1 more | 2004-10-26 |