Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8710472 | Target output device and extreme ultraviolet light source apparatus | Takanobu Ishihara, Kouji Kakizaki, Masahiro Inoue, Takayuki Yabu, Hideo Hoshino | 2014-04-29 |
| 8604453 | Extreme ultraviolet light source apparatus and method of generating ultraviolet light | Akira Endo, Yoshifumi Ueno, Osamu Wakabayashi | 2013-12-10 |
| 8455850 | Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light | Akira Endo, Yoshifumi Ueno, Osamu Wakabayashi | 2013-06-04 |
| 8164076 | Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light | Akira Endo, Yoshifumi Ueno, Osamu Wakabayashi | 2012-04-24 |
| 7582970 | Carbon containing silicon oxide film having high ashing tolerance and adhesion | Sadayuki Ohnishi, Kouichi Owto, Tatsuya Usami, Noboru Morita, Kouji Arita +1 more | 2009-09-01 |
| 7420279 | Carbon containing silicon oxide film having high ashing tolerance and adhesion | Sadayuki Ohnishi, Kouichi Ohto, Tatsuya Usami, Noboru Morita, Kouji Arita +1 more | 2008-09-02 |
| 7215695 | Discharge excitation type pulse laser apparatus | Kouji Kakizaki, Naoki Kataoka | 2007-05-08 |
| 7102236 | Carbon containing silicon oxide film having high ashing tolerance and adhesion | Sadayuki Ohnishi, Kouichi Ohto, Tatsuya Usami, Noboru Morita, Kouji Arita +1 more | 2006-09-05 |
| 6922428 | Gas laser apparatus for lithography | Satoshi Tanaka, Kouji Kakizaki | 2005-07-26 |