Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7582970 | Carbon containing silicon oxide film having high ashing tolerance and adhesion | Sadayuki Ohnishi, Kouichi Owto, Tatsuya Usami, Noboru Morita, Ryouhei Kitao +1 more | 2009-09-01 |
| 7420279 | Carbon containing silicon oxide film having high ashing tolerance and adhesion | Sadayuki Ohnishi, Kouichi Ohto, Tatsuya Usami, Noboru Morita, Ryouhei Kitao +1 more | 2008-09-02 |
| 7102236 | Carbon containing silicon oxide film having high ashing tolerance and adhesion | Sadayuki Ohnishi, Kouichi Ohto, Tatsuya Usami, Noboru Morita, Ryouhei Kitao +1 more | 2006-09-05 |