Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7582970 | Carbon containing silicon oxide film having high ashing tolerance and adhesion | Sadayuki Ohnishi, Tatsuya Usami, Noboru Morita, Kouji Arita, Ryouhei Kitao +1 more | 2009-09-01 |