Issued Patents All Time
Showing 1–25 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940736 | Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Gota Niimi, Shinji Nagai | 2024-03-26 |
| 11553583 | Extreme ultraviolet light generation system and electronic device manufacturing method | Takayuki Yabu | 2023-01-10 |
| 11228156 | Laser system and extreme ultraviolet light generation system | Yuta Takashima | 2022-01-18 |
| 11219116 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yuta Takashima, Yuichi Nishimura, Takayuki Yabu | 2022-01-04 |
| 11043784 | Laser apparatus and EUV light generation system | Tsukasa HORI, Takayuki Yabu, Yoshiaki Kurosawa | 2021-06-22 |
| 10955751 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yuta Takashima | 2021-03-23 |
| 10667376 | Target supply device, extreme ultraviolet light generation device, and target supply method | Yuta Takashima | 2020-05-26 |
| 10609803 | Extreme ultraviolet (EUV) light generating apparatus and control method for centroid of EUV light | Yuichi Nishimura, Takayuki Yabu | 2020-03-31 |
| 10455679 | Extreme ultraviolet light generation device | Takashi Saito, Georg Soumagne | 2019-10-22 |
| 10415793 | Illumination apparatus | Yasushi Ito, Hirofumi Tani, Tomomitsu Hori | 2019-09-17 |
| 10375809 | Extreme ultraviolet light generation device and method for controlling extreme ultraviolet light generation device | Yuta Takashima, Go Shirozu | 2019-08-06 |
| 10303061 | Extreme ultraviolet light generation device | Yuichi Nishimura, Takayuki Yabu | 2019-05-28 |
| 10271414 | Droplet detector and extreme ultraviolet light generating apparatus | Kouichi Satou, Takayuki Yabu, Hirokazu HOSODA | 2019-04-23 |
| 10268118 | Extreme ultraviolet light generating apparatus | — | 2019-04-23 |
| 10194515 | Beam delivery system and control method therefor | Takashi Suganuma, Yoshiaki Kurosawa | 2019-01-29 |
| 10111312 | Extreme ultraviolet light generation device | Toru Suzuki, Kotaro Miyashita, Takuya Ishii | 2018-10-23 |
| 10057972 | Extreme ultraviolet light generation system and method of generating extreme ultraviolet light | Hirokazu HOSODA, Takayuki Yabu | 2018-08-21 |
| 9957421 | Sealing tape, phosphor sheet, lighting device, liquid-crystal display, method for manufacturing phosphor sheet, and sealing method | Yasushi Ito, Tomomitsu Hori, Teruo HIYAMA, Akihiro Yamazaki | 2018-05-01 |
| 9942973 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Hirokazu HOSODA, Takashi Saito | 2018-04-10 |
| 9888555 | Transmission system for transmitting pulse laser beam to extreme ultraviolet light chamber, and laser system | Masahiko Ando, Toru Suzuki | 2018-02-06 |
| 9872372 | Extreme ultraviolet light generation device | Atsushi Ueda, Shinji Nagai, Tamotsu Abe | 2018-01-16 |
| 9577158 | Phosphor sheet-forming resin composition | Yasushi Ito, Hirofumi Tani | 2017-02-21 |
| 9192037 | Control method for target supply device, and target supply device | — | 2015-11-17 |
| 8901522 | Chamber apparatus and extreme ultraviolet light generation system | Shinji Nagai, Osamu Wakabayashi | 2014-12-02 |
| 8841639 | Control method for target supply device, and target supply device | Takayuki Yabu, Takeshi Kodama | 2014-09-23 |