Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8710475 | Extreme ultraviolet light source device and method for generating extreme ultraviolet light | Hiroshi Komori, Tatsuya Yanagida, Akira Sumitani, Akira Endo, Tsukasa HORI | 2014-04-29 |
| 8604453 | Extreme ultraviolet light source apparatus and method of generating ultraviolet light | Akira Endo, Youichi Sasaki, Osamu Wakabayashi | 2013-12-10 |
| 8586953 | Extreme ultra violet light source device | Hiroshi Komori, Georg Soumagne | 2013-11-19 |
| 8513630 | Extreme ultraviolet light source apparatus | Georg Soumagne, Shinji Nagai, Akira Endo, Tatsuya Yanagida | 2013-08-20 |
| 8492738 | Apparatus for and method of withdrawing ions in EUV light production apparatus | Osamu Wakabayashi, Tamotsu Abe, Akira Sumitani, Hideo Hoshino, Akira Endo +1 more | 2013-07-23 |
| 8471226 | Extreme ultraviolet light source device and method for producing extreme ultraviolet light | Hiroshi Komori, Tatsuya Yanagida, Akira Sumitani, Akira Endo, Tsukasa HORI | 2013-06-25 |
| 8455850 | Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light | Akira Endo, Youichi Sasaki, Osamu Wakabayashi | 2013-06-04 |
| 8399867 | Extreme ultraviolet light source apparatus | Akira Endo, Shinji Nagai, Kouji Kakizaki, Osamu Wakabayashi | 2013-03-19 |
| 8354657 | Extreme ultra violet light source apparatus | Georg Soumagne, Hiroshi Komori, Akira Sumitani, Katsunobu Nishihara, Young Gwang Kang +1 more | 2013-01-15 |
| 8300819 | Service providing apparatus and server providing method | Haruhiko Sakaguchi, Tomihiko Nakajima, Tetsuo Sasaki, Osamu Aoki, Akinori Iida +4 more | 2012-10-30 |
| 8288743 | Apparatus for and method of withdrawing ions in EUV light production apparatus | Osamu Wakabayashi, Tamotsu Abe, Akira Sumitani, Hideo Hoshino, Akira Endo +1 more | 2012-10-16 |
| 8256441 | Method for cleaning optical element of EUV light source device and optical element cleaning device | Masato Moriya, Tamotsu Abe, Akira Sumitani | 2012-09-04 |
| 8164076 | Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light | Akira Endo, Youichi Sasaki, Osamu Wakabayashi | 2012-04-24 |
| 8143606 | Extreme ultra violet light source device | Hiroshi Komori, Georg Soumagne | 2012-03-27 |
| 8129700 | Optical element contamination preventing method and optical element contamination preventing device of extreme ultraviolet light source | Masato Moriya, Masaki Nakano, Hiroshi Komori | 2012-03-06 |
| 8067756 | Extreme ultraviolet light source apparatus | Georg Soumagne, Shinji Nagai, Akira Endo, Tatsuya Yanagida | 2011-11-29 |
| 7928418 | Extreme ultra violet light source apparatus | Georg Soumagne, Hiroshi Komori, Akira Sumitani, Katsunobu Nishihara, Young Gwang Kang +1 more | 2011-04-19 |
| 7915600 | Extreme ultra violet light source apparatus | Georg Soumagne, Akira Sumitani, Osamu Wakabayashi | 2011-03-29 |
| 7732794 | Extreme ultra violet light source apparatus | Tamotsu Abe, Takayuki Yabu | 2010-06-08 |
| 7499482 | Injection locking type or MOPA type of laser device | Kiyoharu Nakao | 2009-03-03 |
| 7399929 | Flexible flat cable | Hiroshi Takamatsu, Noriaki Kudo | 2008-07-15 |
| 7230966 | Injection locking type or MOPA type of laser device | Kiyoharu Nakao | 2007-06-12 |
| 7095773 | Injection locking type or MOPA type of laser device | Kiyoharu Nakao | 2006-08-22 |
| 6777622 | Wiring boards | Yokihiro Takikawa | 2004-08-17 |
| 6764765 | Fire-retardant adhesive, fire-retardant adhesive film using the same, and flat cable | Masayuki Kumakura | 2004-07-20 |