Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953729 | Radiation generating apparatus and radiation generating method | Takeshi WATARI, Masaru Takagi, Nakahiro Satoh, Toshiyuki Kawashima, Hirofumi Kan | 2018-04-24 |
| 8354657 | Extreme ultra violet light source apparatus | Georg Soumagne, Yoshifumi Ueno, Hiroshi Komori, Akira Sumitani, Young Gwang Kang +1 more | 2013-01-15 |
| 7928418 | Extreme ultra violet light source apparatus | Georg Soumagne, Yoshifumi Ueno, Hiroshi Komori, Akira Sumitani, Young Gwang Kang +1 more | 2011-04-19 |
| 7885387 | Extreme ultraviolet light and X-ray source target and manufacturing method thereof | Keiji Nagai, Qincui Gu, Takayoshi Norimatsu, Shinsuke Fujioka, Hiroaki Nishimura +2 more | 2011-02-08 |
| 7521702 | Extreme ultraviolet light source and extreme ultraviolet light source target | Keiji Nagai, Hiroaki Nishimura, Takayoshi Norimatsu, Noriaki Miyanaga, Masahiro Nakatsuka +13 more | 2009-04-21 |