Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8354657 | Extreme ultra violet light source apparatus | Georg Soumagne, Yoshifumi Ueno, Hiroshi Komori, Akira Sumitani, Katsunobu Nishihara +1 more | 2013-01-15 |
| 7928418 | Extreme ultra violet light source apparatus | Georg Soumagne, Yoshifumi Ueno, Hiroshi Komori, Akira Sumitani, Katsunobu Nishihara +1 more | 2011-04-19 |