Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11337292 | Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Gouta NIIMI | 2022-05-17 |
| 11145429 | Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device | Atsushi Ueda, Gota Niimi | 2021-10-12 |
| 10455679 | Extreme ultraviolet light generation device | Takashi Saito, Yoshifumi Ueno | 2019-10-22 |
| 10136510 | Extreme ultraviolet light generation device | Shinji Nagai, Toshihiro Nishisaka | 2018-11-20 |
| 9661730 | Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target | Atsushi Ueda, Takayuki Yabu, Osamu Wakabayashi, Takashi Saito | 2017-05-23 |
| 8592787 | Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device | Masato Moriya, Osamu Wakabayashi | 2013-11-26 |
| 8586953 | Extreme ultra violet light source device | Hiroshi Komori, Yoshifumi Ueno | 2013-11-19 |
| 8513630 | Extreme ultraviolet light source apparatus | Yoshifumi Ueno, Shinji Nagai, Akira Endo, Tatsuya Yanagida | 2013-08-20 |
| 8507885 | Semiconductor exposure device using extreme ultra violet radiation | Masato Moriya, Osamu Wakabayashi | 2013-08-13 |
| 8492738 | Apparatus for and method of withdrawing ions in EUV light production apparatus | Yoshifumi Ueno, Osamu Wakabayashi, Tamotsu Abe, Akira Sumitani, Hideo Hoshino +1 more | 2013-07-23 |
| 8354657 | Extreme ultra violet light source apparatus | Yoshifumi Ueno, Hiroshi Komori, Akira Sumitani, Katsunobu Nishihara, Young Gwang Kang +1 more | 2013-01-15 |
| 8288743 | Apparatus for and method of withdrawing ions in EUV light production apparatus | Yoshifumi Ueno, Osamu Wakabayashi, Tamotsu Abe, Akira Sumitani, Hideo Hoshino +1 more | 2012-10-16 |
| 8227778 | Semiconductor exposure device using extreme ultra violet radiation | Masato Moriya, Osamu Wakabayashi | 2012-07-24 |
| 8198613 | Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device | Masato Moriya, Osamu Wakabayashi | 2012-06-12 |
| 8143606 | Extreme ultra violet light source device | Hiroshi Komori, Yoshifumi Ueno | 2012-03-27 |
| 8067756 | Extreme ultraviolet light source apparatus | Yoshifumi Ueno, Shinji Nagai, Akira Endo, Tatsuya Yanagida | 2011-11-29 |
| 7928418 | Extreme ultra violet light source apparatus | Yoshifumi Ueno, Hiroshi Komori, Akira Sumitani, Katsunobu Nishihara, Young Gwang Kang +1 more | 2011-04-19 |
| 7915600 | Extreme ultra violet light source apparatus | Yoshifumi Ueno, Akira Sumitani, Osamu Wakabayashi | 2011-03-29 |
| 7006309 | Prism unit and laser device | Osamu Wakabayashi, Takahito Kumazaki | 2006-02-28 |