Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789374 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yusuke Hoshino, Yukio Watanabe, Toshihiro Nishisaka, Atsushi Ueda, Koichiro Koge +1 more | 2023-10-17 |
| 11337292 | Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Georg Soumagne | 2022-05-17 |