Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7885387 | Extreme ultraviolet light and X-ray source target and manufacturing method thereof | Keiji Nagai, Qincui Gu, Shinsuke Fujioka, Hiroaki Nishimura, Katsunobu Nishihara +2 more | 2011-02-08 |
| 7521702 | Extreme ultraviolet light source and extreme ultraviolet light source target | Keiji Nagai, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Masahiro Nakatsuka +13 more | 2009-04-21 |