Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140898 | Image forming apparatus | — | 2024-11-12 |
| 11500194 | Beam delivery system, focal length selecting method, and electronic device manufacturing method | Takahiro Tatsumi | 2022-11-15 |
| 10842008 | Laser device, and extreme ultraviolet light generation system | — | 2020-11-17 |
| 10461494 | Laser apparatus and extreme ultraviolet light generation system | Yoshiaki Kurosawa | 2019-10-29 |
| 10401615 | Beam dump apparatus, laser apparatus equipped with the beam dump apparatus, and extreme ultraviolet light generating apparatus | Yoshiaki Kurosawa | 2019-09-03 |
| 10374381 | Extreme ultraviolet light generating apparatus | Toru Suzuki, Akihiro Takayama, Yoshiaki Kurosawa | 2019-08-06 |
| 10194515 | Beam delivery system and control method therefor | Yoshifumi Ueno, Yoshiaki Kurosawa | 2019-01-29 |
| 9954339 | Laser unit and extreme ultraviolet light generating system | Hakaru Mizoguchi, Osamu Wakabayashi | 2018-04-24 |
| 9685756 | Laser amplifier, laser apparatus, and extreme ultraviolet light generating system | Hideo Hoshino | 2017-06-20 |
| 9680277 | Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier | Krzysztof Nowak, Takashi Saito, Yasufumi Kawasuji | 2017-06-13 |
| 9667019 | Laser apparatus and extreme ultraviolet light generation system | Masato Moriya, Osamu Wakabayashi | 2017-05-30 |
| 9647406 | Laser unit and extreme ultraviolet light generating system | Takayuki Yabu, Osamu Wakabayashi, Seiji Nogiwa | 2017-05-09 |
| 9362703 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Hakaru Mizoguchi, Hideo Hoshino, Osamu Wakabayashi | 2016-06-07 |
| 9184551 | Laser apparatus and extreme ultraviolet light generation system | Hidenobu Kameda, Masato Moriya, Osamu Wakabayashi | 2015-11-10 |
| 9153927 | Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system | Krzysztof Nowak, Osamu Wakabayashi | 2015-10-06 |
| 9036251 | Slab amplification device, laser apparatus, and extreme ultraviolet light generation system | Krzysztof Nowak, Osamu Wakabayashi | 2015-05-19 |
| 8891161 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Hakaru Mizoguchi, Hideo Hoshino, Osamu Wakabayashi | 2014-11-18 |
| 8804778 | Laser apparatus and extreme ultraviolet light source apparatus | Osamu Wakabayashi, Akira Endo, Krzysztof Nowak, Masato Moriya | 2014-08-12 |
| 8804902 | Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus | Hiroshi Someya, Tamotsu Abe, Hideo Hoshino, Akira Sumitani | 2014-08-12 |
| 8749876 | Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system | Krzysztof Nowak, Osamu Wakabayashi | 2014-06-10 |
| 8698116 | Extreme ultra violet light source apparatus | Masato Moriya, Osamu Wakabayashi, Tamotsu Abe, Akira Endo, Akira Sumitani | 2014-04-15 |
| 8536551 | Extreme ultra violet light source apparatus | Masato Moriya, Osamu Wakabayashi, Tamotsu Abe, Akira Endo, Akira Sumitani | 2013-09-17 |
| 8477412 | Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus | Hiroshi Someya, Tamotsu Abe, Hideo Hoshino, Akira Sumitani | 2013-07-02 |
| 8450706 | Extreme ultraviolet light source apparatus | Tamotsu Abe, Hiroshi Someya, Takayuki Yabu | 2013-05-28 |
| 8445876 | Extreme ultraviolet light source apparatus | Masato Moriya, Tamotsu Abe, Kouji Kakizaki, Osamu Wakabayashi | 2013-05-21 |