Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10868403 | Laser apparatus and extreme ultraviolet light generation system | — | 2020-12-15 |
| 10483713 | Laser apparatus and measurement unit | Seiji Nogiwa | 2019-11-19 |
| 10371469 | Device for controlling temperature of cooling water | Masazumi Komori, Osamu Wakabayashi | 2019-08-06 |
| 10340654 | Laser apparatus and extreme ultraviolet light generating system | Seiji Nogiwa | 2019-07-02 |
| 10250007 | Laser apparatus and method for adding chamber to laser apparatus | — | 2019-04-02 |
| 10224686 | Laser apparatus, EUV light generation system, and method of controlling laser apparatus | Naoya Takaoka, Toshio Yokozuka | 2019-03-05 |
| 9891012 | Device for controlling temperature of cooling water | Masazumi Komori, Osamu Wakabayashi | 2018-02-13 |
| 9837779 | Laser apparatus and laser apparatus manufacturing method | Hideo Hoshino | 2017-12-05 |
| 9762024 | Laser apparatus and extreme ultraviolet light generation system | Yoshiaki Kurosawa | 2017-09-12 |
| 9680277 | Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier | Krzysztof Nowak, Takashi Suganuma, Takashi Saito | 2017-06-13 |
| 9510434 | Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam | Hakaru Mizoguchi, Osamu Wakabayashi | 2016-11-29 |
| 8855164 | Laser apparatus | Osamu Wakabayashi, Junichi Fujimoto, Hideo Iwase | 2014-10-07 |
| 6771685 | Discharge electrodes connecting structure for laser apparatus and laser apparatus therewith | Takayuki Yabu, Takanobu Ishihara, Takashi Matsunaga | 2004-08-03 |
| 6693938 | Discharge circuit for pulsed laser | Hiroshi Umeda, Tetsutarou Takano | 2004-02-17 |
| 6594292 | Saturable reactor and power source apparatus for pulse laser utilizing same | Masao Hagiwara, Yasuhiko Matsuki, Yoshio Nomura | 2003-07-15 |
| 6535540 | Discharge device for pulsed laser | Takashi Matsunaga | 2003-03-18 |
| 6490310 | Laser discharge electrodes with current return plate structure | Takayuki Yabu, Takanobu Ishihara, Takashi Matsunaga | 2002-12-03 |
| 6377595 | Peaking capacitor layout | Hirotoshi Inoue, Tetsutarou Takano, Takashi Matsunaga | 2002-04-23 |
| 6188144 | Power supply unit for pulsed laser using magnetic switch | — | 2001-02-13 |
| 6131692 | Electric power steering controller | — | 2000-10-17 |