Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12166329 | High voltage pulse generation device, gas laser apparatus, and electronic device manufacturing method | Weihua Jiang, Hiroshi Umeda | 2024-12-10 |
| 11604416 | Laser processing method and laser processing system | Masakazu Kobayashi, Akira SUWA, Osamu Wakabayashi | 2023-03-14 |
| 11194255 | Laser processing method and laser processing system | Masakazu Kobayashi, Akira SUWA, Osamu Wakabayashi | 2021-12-07 |
| 7903700 | Narrow-spectrum laser device | Shinji Nagai, Osamu Wakabayashi, Takayuki Yabu, Takahito Kumazaki | 2011-03-08 |
| 6847670 | Gas laser apparatus emitting ultraviolet radiation | Takashi Saito, Hidenori Watanabe | 2005-01-25 |
| 6754247 | ArF excimer laser devices, KrF excimer laser devices and fluorine alser devices | Akifumi Tada | 2004-06-22 |
| 6654402 | Corona preionization electrode unit for use in gas laser apparatus | Kazuaki Hotta, Motohiro Arai | 2003-11-25 |
| 6643312 | ArF excimer laser device and a fluoride laser device | Yoichi Sasaki | 2003-11-04 |
| 6639929 | Pulse oscillating gas laser device | Hakaru Mizoguchi, Takashi Saito, Naoki Kataoka | 2003-10-28 |
| 6636546 | ArF and KrF excimer laser apparatus and fluorine laser apparatus for lithography | Yoichi Sasaki | 2003-10-21 |
| 6584131 | ArF excimer laser device for exposure | — | 2003-06-24 |
| 6480519 | Gas laser device that emits ultraviolet rays | Motohiro Arai | 2002-11-12 |