Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7065240 | Reticle inspection apparatus | — | 2006-06-20 |
| 6754247 | ArF excimer laser devices, KrF excimer laser devices and fluorine alser devices | Koji Kakizaki | 2004-06-22 |
| 6621847 | Narrow-band excimer laser apparatus | — | 2003-09-16 |
| 6590921 | Narrow beam ArF excimer laser device | Tatushi Igarashi | 2003-07-08 |
| 5764678 | Wavelength-stabilized narrow band excimer laser | — | 1998-06-09 |