Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971887 | Laser device and laser device control method | — | 2021-04-06 |
| 10102938 | Extreme ultraviolet light generating apparatus | Takayuki Yabu, Tamotsu Abe, Kenichi Miyao | 2018-10-16 |
| 9954340 | Excimer laser apparatus and excimer laser system | Takeshi Ohta, Hiroaki TSUSHIMA, Osamu Wakabayashi | 2018-04-24 |
| 9425576 | Excimer laser apparatus and excimer laser system | Takeshi Ohta, Hiroaki TSUSHIMA, Osamu Wakabayashi | 2016-08-23 |
| 8867583 | Excimer laser apparatus and excimer laser system | Takeshi Ohta, Hiroaki TSUSHIMA, Osamu Wakabayashi | 2014-10-21 |
| 8569722 | Extreme ultraviolet light generation apparatus | Kouji Kakizaki, Osamu Wakabayashi | 2013-10-29 |
| 8525140 | Chamber apparatus, extreme ultraviolet light generation system, and method for controlling the extreme ultraviolet light generation system | Osamu Wakabayashi | 2013-09-03 |
| 8502178 | Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon | Masato Moriya, Hideyuki Hayashi | 2013-08-06 |
| 8324600 | Apparatus and method for measuring and controlling target trajectory in chamber apparatus | Hideyuki Hayashi, Kouji Kakizaki, Toshihiro Nishisaka | 2012-12-04 |
| 6031341 | Miniaturized transformer and inverter circuit and discharge tube glow circuit including such miniaturized transformer | Yoshihito Yoshizawa, Shunsuke Arakawa | 2000-02-29 |
| 5751092 | Piezoelectric transformer and power converting apparatus employing the same | — | 1998-05-12 |
| 5705879 | Discharge tube driving device and piezoelectric transformer therefor | Sigeru Jomura, Toshiyuki Tamakai | 1998-01-06 |
| 5635828 | Active filter circuit and power supply apparatus including same | Yoshihito Yoshizawa, Shin Nakajima, Shunsuke Arakawa | 1997-06-03 |
| 5322612 | Carbon dioxide gas detection element | Takaaki Kuroiwa, Yoshihiko Sadaoka | 1994-06-21 |
| 5296819 | Polymer capacitative moisture sensitive device comprising heating means | Takaaki Kuroiwa, Tetsuya Miyagishi | 1994-03-22 |
| 5161085 | Moisture sensitive element and method of manufacturing the same | Yoshirou Sakai, Yoshihiko Sadaoka, Masanobu Matsuguchi, Takaaki Kuroiwa | 1992-11-03 |
| 4920451 | Moisture-sensitive element | Yoshiro Sakai, Yoshihiko Sadaoka, Takaai Kuroiwa, Tetsuya Miyagishi | 1990-04-24 |