Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10102938 | Extreme ultraviolet light generating apparatus | Takayuki Yabu, Tamotsu Abe, Tooru Abe | 2018-10-16 |
| 8811436 | Laser apparatus, extreme ultraviolet light generation system including the laser apparatus, and method for controlling the laser apparatus | Motoki Niwano, Osamu Wakabayashi | 2014-08-19 |