Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11006511 | Laser device and extreme ultraviolet light generation device using delay determination at a shutter | — | 2021-05-11 |
| 10481422 | Laser device and extreme ultraviolet light generation device | — | 2019-11-19 |
| 8811436 | Laser apparatus, extreme ultraviolet light generation system including the laser apparatus, and method for controlling the laser apparatus | Kenichi Miyao, Osamu Wakabayashi | 2014-08-19 |
| 6522674 | Pulsed laser control system | Shoichi Sakanishi, Takeshi Okamoto, Hideyuki Hayashi, Hiroshi Tanaka | 2003-02-18 |