Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8477412 | Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus | Hiroshi Someya, Tamotsu Abe, Takashi Suganuma, Akira Sumitani | 2013-07-02 |
| 8445877 | Extreme ultraviolet light source apparatus and target supply device | Hiroshi Someya, Tamotsu Abe | 2013-05-21 |
| 8436328 | Extreme ultraviolet light source apparatus | Tatsuya Yanagida, Akira Endo, Hiroshi Komori, Shinji Nagai, Kouji Kakizaki +1 more | 2013-05-07 |
| 8395133 | Apparatus and method of adjusting a laser light source for an EUV source device | Masato Moriya, Osamu Wakabayashi, Hakaru Mizoguchi | 2013-03-12 |
| 8324601 | Extreme ultra violet light source apparatus | Tamotsu Abe, Akira Endo | 2012-12-04 |
| 8288743 | Apparatus for and method of withdrawing ions in EUV light production apparatus | Yoshifumi Ueno, Osamu Wakabayashi, Tamotsu Abe, Akira Sumitani, Akira Endo +1 more | 2012-10-16 |
| 8238392 | Temperature controller for gas laser | Yukio Watanabe, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki | 2012-08-07 |
| 8212228 | Extreme ultra violet light source apparatus | Tamotsu Abe, Toshihiro Nishisaka, Hiroshi Someya, Masato Moriya, Takeshi Asayama +1 more | 2012-07-03 |
| 8093571 | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device | Akira Endo, Krzysztof Nowak, Tatsuya Ariga, Masato Moriya, Osamu Wakabayashi | 2012-01-10 |
| 8003962 | Extreme ultraviolet light source apparatus and nozzle protection device | Hiroshi Someya, Tamotsu Abe | 2011-08-23 |
| 8000361 | Laser system | Tamotsu Abe, Akira Endo, Osamu Wakabayashi, Kouji Kakizaki | 2011-08-16 |
| 7842937 | Extreme ultra violet light source apparatus | Tamotsu Abe, Akira Endo | 2010-11-30 |
| 7297968 | Debris collector for EUV light generator | Akira Endo | 2007-11-20 |
| 7271401 | Extreme ultra violet light source device | Yousuke Imai, Hiroshi Komori | 2007-09-18 |
| 6987279 | Light source device and exposure equipment using the same | Hiroshi Komori, Akira Endo | 2006-01-17 |