Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8349542 | Manufacturing process of semiconductor device | Miwa Kozawa, Koji Nozaki, Junichi Kon, Ei Yano | 2013-01-08 |
| 8334091 | Resist pattern swelling material, and method for patterning using same | Koji Nozaki, Miwa Kozawa, Junichi Kon, Ei Yano | 2012-12-18 |
| 8198014 | Resist cover film forming material, resist pattern forming method, and electronic device and method for manufacturing the same | Miwa Kozawa, Koji Nozaki | 2012-06-12 |
| 8198009 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for producing the same | Miwa Kozawa, Koji Nozaki | 2012-06-12 |
| 7820367 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for producing the same | Miwa Kozawa, Koji Nozaki | 2010-10-26 |
| 7799508 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same | Koji Nozaki, Miwa Kozawa | 2010-09-21 |
| 7744768 | Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof | Miwa Kozawa, Koji Nozaki, Junichi Kon, Ei Yano | 2010-06-29 |
| 7642650 | Semiconductor device having a pillar structure | Iwao Sugiura, Yoshihiro Matsuoka | 2010-01-05 |
| 7585610 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same | Koji Nozaki, Miwa Kozawa | 2009-09-08 |
| 7550248 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same | Koji Nozaki, Miwa Kozawa | 2009-06-23 |
| 7452657 | Resist composition, method of forming resist pattern, semiconductor device and method of manufacturing thereof | Koji Nozaki, Miwa Kozawa | 2008-11-18 |
| 7364829 | Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device | Miwa Kozawa, Koji Nozaki, Junichi Kon | 2008-04-29 |
| 7361448 | Resist pattern thickening material and process for forming the same, and semiconductor device and process for manufacturing the same | Koji Nozaki, Miwa Kozawa | 2008-04-22 |
| 7338750 | Resist pattern thickness reducing material, resist pattern and process for forming thereof, and semiconductor device and process for manufacturing thereof | Miwa Kozawa, Koji Nozaki, Junichi Kon | 2008-03-04 |
| 7202289 | Biodegradable resin composition, filler therefor and molded article thereof | Koji Nozaki | 2007-04-10 |
| 7189783 | Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof | Miwa Kozawa, Koji Nozaki, Junichi Kon, Ei Yano | 2007-03-13 |
| 6794113 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Ei Yano, Junichi Kon, Miwa Kozawa | 2004-09-21 |
| 6794112 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Ei Yano, Junichi Kon, Miwa Kozawa | 2004-09-21 |
| 6787288 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Ei Yano, Junichi Kon, Miwa Kozawa | 2004-09-07 |
| 6773867 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Ei Yano, Junichi Kon, Miwa Kozawa | 2004-08-10 |
| 6605414 | Method for manufacturing magnetoresistance head | Keiji Watanabe, Koji Nozaki, Miwa Igarashi, Yoko Kuramitsu, Ei Yano +4 more | 2003-08-12 |
| 6582878 | Chemical amplification resist compositions and process for the formation of resist patterns | Ei Yano, Keiji Watanabe, Koji Nozaki, Miwa Igarashi, Yoko Kuramitsu | 2003-06-24 |
| 6506534 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Ei Yano, Junichi Kon, Miwa Kozawa | 2003-01-14 |
| 6465137 | Resist composition and pattern forming process | Keiji Watanabe, Miwa Kozawa, Ei Yano, Koji Nozaki, Junichi Kon +4 more | 2002-10-15 |
| 6329125 | Chemically amplified resist compositions and process for the formation of resist patterns | Satoshi Takechi, Akiko Kotachi, Koji Nozaki, Ei Yano, Keiji Watanabe +3 more | 2001-12-11 |