Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980535 | Resist pattern improving material, method for forming resist pattern, and method for producing semiconductor device | Koji Nozaki | 2015-03-17 |
| 8945816 | Method for forming resist pattern, semiconductor device and production method thereof | Koji Nozaki | 2015-02-03 |
| 8945822 | Resist pattern thickening material, method for forming resist pattern, semiconductor device and method for manufacturing the same | Koji Nozaki | 2015-02-03 |
| 8906598 | Pattern forming method, method for manufacturing semiconductor device, and material for forming coating layer of resist pattern | Koji Nozaki | 2014-12-09 |
| 8795949 | Resist pattern improving material, method for forming resist pattern, and method for producing semiconductor device | Koji Nozaki | 2014-08-05 |
| 8748077 | Resist pattern improving material, method for forming resist pattern, method for producing semiconductor device, and semiconductor device | Koji Nozaki | 2014-06-10 |
| 8652751 | Resist composition, method for forming resist pattern, and method for producing electronic device | Koji Nozaki | 2014-02-18 |
| 8476346 | Resist pattern thickening material, semiconductor device, and production method thereof | Koji Nozaki | 2013-07-02 |
| 8420288 | Resist pattern thickening material, method for forming resist pattern, semiconductor device and method for manufacturing the same | Koji Nozaki | 2013-04-16 |
| 8349542 | Manufacturing process of semiconductor device | Koji Nozaki, Takahisa Namiki, Junichi Kon, Ei Yano | 2013-01-08 |
| 8338080 | Process for forming resist pattern, semiconductor device and fabrication thereof | Koji Nozaki | 2012-12-25 |
| 8334091 | Resist pattern swelling material, and method for patterning using same | Koji Nozaki, Takahisa Namiki, Junichi Kon, Ei Yano | 2012-12-18 |
| 8198009 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for producing the same | Koji Nozaki, Takahisa Namiki | 2012-06-12 |
| 8198014 | Resist cover film forming material, resist pattern forming method, and electronic device and method for manufacturing the same | Koji Nozaki, Takahisa Namiki | 2012-06-12 |
| 8129092 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and method for manufacturing the same | Koji Nozaki | 2012-03-06 |
| 8119325 | Method for forming resist pattern, semiconductor device and production method thereof | Koji Nozaki | 2012-02-21 |
| 7820367 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for producing the same | Koji Nozaki, Takahisa Namiki | 2010-10-26 |
| 7799508 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same | Koji Nozaki, Takahisa Namiki | 2010-09-21 |
| 7744768 | Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof | Koji Nozaki, Takahisa Namiki, Junichi Kon, Ei Yano | 2010-06-29 |
| 7662539 | Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device | Koji Nozaki | 2010-02-16 |
| 7625688 | Resist pattern thickening material, resist pattern and process for forming the same, and semiconductor device and process for manufacturing the same | Koji Nozaki | 2009-12-01 |
| 7611819 | Resist composition, method for forming resist pattern, and semiconductor device and method for manufacturing the same | Koji Nozaki | 2009-11-03 |
| 7608386 | Resist cover film-forming material, process for forming resist pattern, semiconductor device and process for manufacturing the same | Koji Nozaki | 2009-10-27 |
| 7592127 | Resist pattern thickening material, resist pattern and process for forming the same, and semiconductor device and process for manufacturing the same | Koji Nozaki | 2009-09-22 |
| 7585610 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same | Koji Nozaki, Takahisa Namiki | 2009-09-08 |