Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7550248 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same | Takahisa Namiki, Koji Nozaki | 2009-06-23 |
| 7488569 | Negative resist composition, a method for forming a resist pattern thereof, and a method for fabricating a semiconductor device | Koji Nozaki, Keiji Watanabe, Ei Yano | 2009-02-10 |
| 7452657 | Resist composition, method of forming resist pattern, semiconductor device and method of manufacturing thereof | Takahisa Namiki, Koji Nozaki | 2008-11-18 |
| 7439010 | Alkali-soluble siloxane polymer, positive type resist composition, resist pattern, process for forming the same, electronic device and process for manufacturing the same | Keiji Watanabe, Shoichi Suda, Fumi Yamaguchi, Isao Yahagi, Michitaka Morikawa | 2008-10-21 |
| 7416837 | Resist pattern-improving material and a method for preparing a resist pattern by using the same | Koji Nozaki | 2008-08-26 |
| 7364829 | Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device | Koji Nozaki, Takahisa Namiki, Junichi Kon | 2008-04-29 |
| 7361448 | Resist pattern thickening material and process for forming the same, and semiconductor device and process for manufacturing the same | Koji Nozaki, Takahisa Namiki | 2008-04-22 |
| 7338750 | Resist pattern thickness reducing material, resist pattern and process for forming thereof, and semiconductor device and process for manufacturing thereof | Koji Nozaki, Takahisa Namiki, Junichi Kon | 2008-03-04 |
| 7189783 | Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof | Koji Nozaki, Takahisa Namiki, Junichi Kon, Ei Yano | 2007-03-13 |
| 7144968 | Silicon-containing polymer, process for its production, resist composition employing it, pattern-forming method and electronic device fabrication method | Keiji Watanabe, Ei Yano | 2006-12-05 |
| 7122288 | Negative resist composition, a method for forming a resist pattern thereof, and a method for fabricating a semiconductor device | Koji Nozaki, Keiji Watanabe, Ei Yano | 2006-10-17 |
| 6949324 | Alkali-soluble siloxane polymer, positive type resist composition, resist pattern, process for forming the same, electronic device and process for manufacturing the same | Keiji Watanabe, Shoichi Suda, Fumi Yamaguchi, Isao Yahagi, Michitaka Morikawa | 2005-09-27 |
| 6794112 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Takahisa Namiki, Ei Yano, Junichi Kon | 2004-09-21 |
| 6794113 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Takahisa Namiki, Ei Yano, Junichi Kon | 2004-09-21 |
| 6787288 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Takahisa Namiki, Ei Yano, Junichi Kon | 2004-09-07 |
| 6773867 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Takahisa Namiki, Ei Yano, Junichi Kon | 2004-08-10 |
| 6770417 | Negative resist composition, process for forming resist patterns, and process for manufacturing electron device | Koji Nozaki, Ei Yano | 2004-08-03 |
| 6541077 | Silicon-containing polymer, process for its production, resist composition employing it, pattern-forming method and electronic device fabrication method | Keiji Watanabe, Ei Yano | 2003-04-01 |
| 6506534 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Koji Nozaki, Takahisa Namiki, Ei Yano, Junichi Kon | 2003-01-14 |
| 6465137 | Resist composition and pattern forming process | Keiji Watanabe, Ei Yano, Takahisa Namiki, Koji Nozaki, Junichi Kon +4 more | 2002-10-15 |
| 6342562 | Silicon-containing polymer, process for its production, resist composition employing it, pattern-forming method and electronic device fabrication method | Keiji Watanabe, Ei Yano | 2002-01-29 |