Issued Patents All Time
Showing 1–25 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980535 | Resist pattern improving material, method for forming resist pattern, and method for producing semiconductor device | Miwa Kozawa | 2015-03-17 |
| 8945822 | Resist pattern thickening material, method for forming resist pattern, semiconductor device and method for manufacturing the same | Miwa Kozawa | 2015-02-03 |
| 8945816 | Method for forming resist pattern, semiconductor device and production method thereof | Miwa Kozawa | 2015-02-03 |
| 8906598 | Pattern forming method, method for manufacturing semiconductor device, and material for forming coating layer of resist pattern | Miwa Kozawa | 2014-12-09 |
| 8795949 | Resist pattern improving material, method for forming resist pattern, and method for producing semiconductor device | Miwa Kozawa | 2014-08-05 |
| 8748077 | Resist pattern improving material, method for forming resist pattern, method for producing semiconductor device, and semiconductor device | Miwa Kozawa | 2014-06-10 |
| 8652751 | Resist composition, method for forming resist pattern, and method for producing electronic device | Miwa Kozawa | 2014-02-18 |
| 8476346 | Resist pattern thickening material, semiconductor device, and production method thereof | Miwa Kozawa | 2013-07-02 |
| 8449787 | Method for wet etching while forming interconnect trench in insulating film | Tadahiro Imada, Yoshihiro Nakata | 2013-05-28 |
| 8420288 | Resist pattern thickening material, method for forming resist pattern, semiconductor device and method for manufacturing the same | Miwa Kozawa | 2013-04-16 |
| 8349536 | Dithiane derivative, polymer, resist composition, and method for manufacturing semiconductor device using such resist composition | — | 2013-01-08 |
| 8349542 | Manufacturing process of semiconductor device | Miwa Kozawa, Takahisa Namiki, Junichi Kon, Ei Yano | 2013-01-08 |
| 8338080 | Process for forming resist pattern, semiconductor device and fabrication thereof | Miwa Kozawa | 2012-12-25 |
| 8334091 | Resist pattern swelling material, and method for patterning using same | Miwa Kozawa, Takahisa Namiki, Junichi Kon, Ei Yano | 2012-12-18 |
| 8303014 | Pick-up style utility vehicle with expandable cargo bed | Yoshihiko Orihashi, Yohei Sasaki, Naohisa Masuda, Yoshihiro Watanabe, Hirokazu Morita +3 more | 2012-11-06 |
| 8198009 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for producing the same | Miwa Kozawa, Takahisa Namiki | 2012-06-12 |
| 8198014 | Resist cover film forming material, resist pattern forming method, and electronic device and method for manufacturing the same | Miwa Kozawa, Takahisa Namiki | 2012-06-12 |
| 8129092 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and method for manufacturing the same | Miwa Kozawa | 2012-03-06 |
| 8119325 | Method for forming resist pattern, semiconductor device and production method thereof | Miwa Kozawa | 2012-02-21 |
| 8088556 | Thiopyran derivative, polymer, resist composition, and method for manufacturing semiconductor device using such resist composition | — | 2012-01-03 |
| 8080365 | Thiopyran derivative, polymer, resist composition, and method for manufacturing semiconductor device using such resist composition | — | 2011-12-20 |
| 7916583 | Optical disk reproducing device having an intermittent reproducing unit | — | 2011-03-29 |
| 7913281 | Digital broadcast recording device | Akihiro Yuba | 2011-03-22 |
| 7897321 | Monomer, resin, resist composition using the resin, and method producing semiconductor device using the resist composition | — | 2011-03-01 |
| 7820367 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for producing the same | Miwa Kozawa, Takahisa Namiki | 2010-10-26 |