Issued Patents All Time
Showing 26–50 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7799508 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same | Miwa Kozawa, Takahisa Namiki | 2010-09-21 |
| 7744768 | Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof | Miwa Kozawa, Takahisa Namiki, Junichi Kon, Ei Yano | 2010-06-29 |
| 7662539 | Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device | Miwa Kozawa | 2010-02-16 |
| 7656754 | Optical disk player | — | 2010-02-02 |
| 7652964 | Optical disk device | — | 2010-01-26 |
| 7625688 | Resist pattern thickening material, resist pattern and process for forming the same, and semiconductor device and process for manufacturing the same | Miwa Kozawa | 2009-12-01 |
| 7611819 | Resist composition, method for forming resist pattern, and semiconductor device and method for manufacturing the same | Miwa Kozawa | 2009-11-03 |
| 7608386 | Resist cover film-forming material, process for forming resist pattern, semiconductor device and process for manufacturing the same | Miwa Kozawa | 2009-10-27 |
| 7592127 | Resist pattern thickening material, resist pattern and process for forming the same, and semiconductor device and process for manufacturing the same | Miwa Kozawa | 2009-09-22 |
| 7585610 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same | Miwa Kozawa, Takahisa Namiki | 2009-09-08 |
| 7550248 | Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same | Takahisa Namiki, Miwa Kozawa | 2009-06-23 |
| 7488569 | Negative resist composition, a method for forming a resist pattern thereof, and a method for fabricating a semiconductor device | Miwa Kozawa, Keiji Watanabe, Ei Yano | 2009-02-10 |
| 7456103 | Etch-resistant film, forming method thereof, surface-modified resist pattern, forming method thereof, semiconductor device and manufacturing method thereof | Masayuki Takeda | 2008-11-25 |
| 7452657 | Resist composition, method of forming resist pattern, semiconductor device and method of manufacturing thereof | Takahisa Namiki, Miwa Kozawa | 2008-11-18 |
| 7419894 | Gate electrode and manufacturing method thereof, and semiconductor device and manufacturing method thereof | Kozo Makiyama | 2008-09-02 |
| 7416837 | Resist pattern-improving material and a method for preparing a resist pattern by using the same | Miwa Kozawa | 2008-08-26 |
| 7364829 | Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device | Miwa Kozawa, Takahisa Namiki, Junichi Kon | 2008-04-29 |
| 7361448 | Resist pattern thickening material and process for forming the same, and semiconductor device and process for manufacturing the same | Takahisa Namiki, Miwa Kozawa | 2008-04-22 |
| 7338750 | Resist pattern thickness reducing material, resist pattern and process for forming thereof, and semiconductor device and process for manufacturing thereof | Miwa Kozawa, Takahisa Namiki, Junichi Kon | 2008-03-04 |
| 7220628 | Semiconductor device and manufacturing method thereof, and gate electrode and manufacturing method thereof | Junichi Kon, Kozo Makiyama, Toshihiro Ohki | 2007-05-22 |
| 7202289 | Biodegradable resin composition, filler therefor and molded article thereof | Takahisa Namiki | 2007-04-10 |
| 7189783 | Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof | Miwa Kozawa, Takahisa Namiki, Junichi Kon, Ei Yano | 2007-03-13 |
| 7122288 | Negative resist composition, a method for forming a resist pattern thereof, and a method for fabricating a semiconductor device | Miwa Kozawa, Keiji Watanabe, Ei Yano | 2006-10-17 |
| 6887644 | Polymer compound for a chemical amplification resist and a fabrication process of a semiconductor device using such a chemical amplification resist | Ei Yano | 2005-05-03 |
| 6844135 | Chemically amplified resist material and patterning method using same | Junichi Kon, Ei Yano | 2005-01-18 |