Issued Patents All Time
Showing 51–75 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794112 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Takahisa Namiki, Ei Yano, Junichi Kon, Miwa Kozawa | 2004-09-21 |
| 6794113 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Takahisa Namiki, Ei Yano, Junichi Kon, Miwa Kozawa | 2004-09-21 |
| 6787288 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Takahisa Namiki, Ei Yano, Junichi Kon, Miwa Kozawa | 2004-09-07 |
| 6773867 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Takahisa Namiki, Ei Yano, Junichi Kon, Miwa Kozawa | 2004-08-10 |
| 6770417 | Negative resist composition, process for forming resist patterns, and process for manufacturing electron device | Ei Yano, Miwa Kozawa | 2004-08-03 |
| 6656659 | Resist composition suitable for short wavelength exposure and resist pattern forming method | Ei Yano | 2003-12-02 |
| 6605414 | Method for manufacturing magnetoresistance head | Keiji Watanabe, Miwa Igarashi, Yoko Kuramitsu, Ei Yano, Takahisa Namiki +4 more | 2003-08-12 |
| 6582878 | Chemical amplification resist compositions and process for the formation of resist patterns | Takahisa Namiki, Ei Yano, Keiji Watanabe, Miwa Igarashi, Yoko Kuramitsu | 2003-06-24 |
| 6574170 | Recording medium reproduction apparatus | — | 2003-06-03 |
| 6506534 | Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices | Takahisa Namiki, Ei Yano, Junichi Kon, Miwa Kozawa | 2003-01-14 |
| 6465137 | Resist composition and pattern forming process | Keiji Watanabe, Miwa Kozawa, Ei Yano, Takahisa Namiki, Junichi Kon +4 more | 2002-10-15 |
| 6451501 | Acid sensitive copolymer, resist composition and resist pattern forming method | Ei Yano | 2002-09-17 |
| 6329125 | Chemically amplified resist compositions and process for the formation of resist patterns | Satoshi Takechi, Akiko Kotachi, Ei Yano, Keiji Watanabe, Takahisa Namiki +3 more | 2001-12-11 |
| 6200725 | Chemically amplified resist compositions and process for the formation of resist patterns | Satoshi Takechi, Akiko Kotachi, Ei Yano, Keiji Watanabe, Takahisa Namiki +3 more | 2001-03-13 |
| 6200724 | Chemical amplification resist compositions and process for the formation of resist patterns | Takahisa Namiki, Ei Yano, Keiji Watanabe, Miwa Igarashi, Yoko Kuramitsu | 2001-03-13 |
| 6052261 | Method for manufacturing magnetoresistance head | Keiji Watanabe, Miwa Igarashi, Yoko Kuramitsu, Ei Yano, Takahisa Namiki +4 more | 2000-04-18 |
| 6027856 | Negative-type resist composition and process for forming resist patterns | Ei Yano | 2000-02-22 |
| 6013416 | Chemically amplified resist compositions and process for the formation of resist patterns | Ei Yano, Keiji Watanabe, Takahisa Namiki, Miwa Igarashi, Yoko Kuramitsu +3 more | 2000-01-11 |
| 5968713 | Chemically amplified resist compositions and process for the formation of resist patterns | Ei Yano, Keiji Watanabe, Takahisa Namiki, Miwa Igarashi, Yoko Kuramitsu +3 more | 1999-10-19 |
| 5962191 | Resist compositions for forming resist patterns | Ei Yano, Keiji Watanabe, Takahisa Namiki, Miwa Igarashi, Yoko Kuramitsu | 1999-10-05 |
| 5932014 | Apparatus for producing semiconductor device | Tetsuya Hayashi, Kazunori Okuyama, Tsuyoshi Inomata, Minoru Hirose | 1999-08-03 |
| 5910392 | Resist composition, a process for forming a resist pattern and a process for manufacturing a semiconductor device | Ei Yano, Keiji Watanabe, Takahisa Namiki, Miwa Igarashi | 1999-06-08 |
| 5824452 | Resist compositions and process for the formation of resist patterns | Ei Yano, Keiji Watanabe, Takahisa Namiki, Miwa Igarashi, Yoko Kuramitsu | 1998-10-20 |
| 5609688 | Apparatus for producing semiconductor device | Tetsuya Hayashi, Kazunori Okuyama, Tsuyoshi Inomata, Minoru Hirose | 1997-03-11 |
| 5585219 | Resist composition and process for forming resist pattern | Yuko Kaimoto | 1996-12-17 |