Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5932014 | Apparatus for producing semiconductor device | Tetsuya Hayashi, Kazunori Okuyama, Koji Nozaki, Minoru Hirose | 1999-08-03 |
| 5609688 | Apparatus for producing semiconductor device | Tetsuya Hayashi, Kazunori Okuyama, Koji Nozaki, Minoru Hirose | 1997-03-11 |