Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10485085 | Extreme ultraviolet light sensor unit and extreme ultraviolet light generation device | Hiroshi Someya, Takuya Ishii | 2019-11-19 |
| 6809448 | Excimer laser apparatus | Natsushi Suzuki, Shunsuke Yoshioka, Toshimitsu Barada, Atsushi Ooyama, Toshiharu Nakazawa +2 more | 2004-10-26 |
| 6597719 | Once through fan for gas laser apparatus and gas laser apparatus therewith | Natsushi Suzuki | 2003-07-22 |
| 6577664 | Excimer laser device | Toshihiro Nishisaka | 2003-06-10 |
| 6535539 | Excimer laser device | Kiyoharu Nakao, Shunsuke Yoshioka | 2003-03-18 |
| 6337872 | Once through fan for excimer laser apparatus | Kiyoharu Nakao, Hakaru Mizoguchi, Toshihiro Nishisaka, Tatsuo Enami | 2002-01-08 |