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Substrate rotation device, substrate cleaning device, substrate processing device, and control method for substrate rotation device |
Ichiju Satoh |
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Tomonori Ohashi, Hironobu Yamasaki, Misako Kudo, Ichiju Sato |
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Magnetic levitated pump |
Ichiju Sato, Hiroshi Sobukawa, Tomonori Ohashi, Satoshi Mori |
2021-05-04 |
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Magnetic bearing apparatus and method for reducing vibration caused by magnetic bearing apparatus |
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2016-07-12 |
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Turbo vacuum pump |
Hiroyuki Kawasaki |
2012-01-03 |
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Magnetic bearing device and method |
Toshiya Yoshida |
2011-07-12 |
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Magnetic bearing apparatus |
Toshiya Yoshida |
2011-05-17 |
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Magnetic bearing device and method |
Toshiya Yoshida |
2010-11-09 |
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Magnetic bearing apparatus |
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2006-01-10 |
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Excimer laser apparatus |
Natsushi Suzuki, Hisashi Nara, Shunsuke Yoshioka, Atsushi Ooyama, Toshiharu Nakazawa +2 more |
2004-10-26 |
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Electric discharge gas laser |
Atushi Ooyama, Shinichi Sekiguchi, Hiroyuki Shinozaki, Toshiharu Nakazawa |
2004-08-31 |
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Discharge-pumped excimer laser device |
Shinichi Sekiguchi, Hiroyuki Shinozaki, Toshiharu Nakazawa |
2003-08-05 |
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Discharge-pumped excimer laser device |
Hiroyuki Shinozaki, Shinichi Sekiguchi, Toshiharu Nakazawa |
2003-03-25 |
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Magnetic bearing and circulation fan apparatus |
Shinichi Sekiguchi, Hiroyuki Shinozaki, Shunichi Aiyoshizawa, Atsushi Ooyama |
2003-02-11 |
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Circulation fan apparatus and circulation-fan driving motor |
Shinichi Sekiguchi, Hiroyuki Shinozaki, Toshiharu Nakazawa, Takeshi Kawamura |
2002-10-15 |
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Magnetic bearing device for motor-combined structure |
Atsushi Ooyama, Toshiharu Nakazawa, Shinichi Sekiguchi, Masakazu Komai |
2002-09-24 |
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Magnetic bearing device |
Atsushi Ooyama, Toshiharu Nakazawa |
2002-06-11 |
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Excimer laser device |
Shinichi Sekiguchi, Hiroyuki Shinozaki, Toshiharu Nakazawa |
2002-04-02 |
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Magnetic bearing device |
Toshiharu Nakazawa, Atsushi Ooyama, Masafumi Inoue, Shinichi Sekiguchi, Hiroyuki Shinozaki |
2001-12-04 |