Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11731241 | Substrate rotation device, substrate cleaning device, substrate processing device, and control method for substrate rotation device | Toshimitsu Barada | 2023-08-22 |
| 6437864 | Stage positioning device | Katsuhide Watanabe, Takahide Haga, Yoshinori Jouno | 2002-08-20 |
| 6354907 | Polishing apparatus including attitude controller for turntable and/or wafer carrier | Norio Kimura, Katsuya Okumura | 2002-03-12 |
| 6322434 | Polishing apparatus including attitude controller for dressing apparatus | Norio Kimura | 2001-11-27 |
| 6213737 | Damper device and turbomolecular pump with damper device | Chikara Murakami | 2001-04-10 |
| 6212540 | Filter circuit | Chikara Murakami | 2001-04-03 |
| 6183342 | Polishing apparatus | Katsuhide Watanabe, Noburu Shimizu | 2001-02-06 |
| 5951368 | Polishing apparatus | Katsuhide Watanabe, Noburu Shimizu | 1999-09-14 |