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Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing endpoint detection method |
Yoichi Kobayashi, Shinrou Ohta |
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Polishing end point detection method |
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Polishing apparatus and polishing method |
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Polishing method |
Shinrou Ohta, Mitsuo Tada, Yoichi Kobayashi, Taro Takahashi, Eisaku Hayashi +3 more |
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Shinrou Ohta, Yoichi Kobayashi |
2010-08-24 |
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Method and apparatus for polishing workpiece |
Norio Kimura |
2006-03-14 |
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Method for polishing workpieces using fixed abrasives |
Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada, Hisanori Matsuo |
2003-07-22 |
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Method and apparatus for polishing workpiece |
Norio Kimura |
2002-07-02 |
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Method and apparatus for polishing workpiece |
Norio Kimura |
2002-02-05 |
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Polishing apparatus |
Katsuhide Watanabe, Ichiju Satoh |
2001-02-06 |
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Koji Ato |
2000-11-21 |
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Method for polishing workpieces and apparatus therefor |
Norio Kimura |
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Hiroyuki Yano, Katsuya Okumura, Norio Kimura |
1999-09-21 |
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— |
1998-10-27 |
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Screw vacuum pump |
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1994-12-20 |
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1994-05-24 |
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Gas rotary machine |
Hideki Kondo, Yoichi Kanemitsu |
1987-08-25 |