Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8965555 | Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus | Akira Fukuda, Yoshihiro Mochizuki, Yutaka Wada, Yoichi Shiokawa | 2015-02-24 |
| 8655478 | Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus | Akira Fukuda, Yoshihiro Mochizuki, Yutaka Wada, Yoichi Shiokawa | 2014-02-18 |
| 7527723 | Electrolytic processing apparatus and electrolytic processing method | Itsuki Kobata, Yutaka Wada, Takayuki Saito, Yasushi Toma, Tsukuru Suzuki +1 more | 2009-05-05 |
| 7361076 | Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Yoshihiro Mochizuki, Akira Fukuda, Kazuto Hirokawa +1 more | 2008-04-22 |
| 7314574 | Etching method and apparatus | Katsunori Ichiki, Kazuo Yamauchi, Seiji Samukawa | 2008-01-01 |
| 7291057 | Apparatus for polishing a substrate | Norio Kimura, Yu Ishii, Katsuya Okumura, Hiroyuki Yano | 2007-11-06 |
| 7234999 | Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Yoshihiro Mochizuki, Akira Fukuda, Kazuto Hirokawa +1 more | 2007-06-26 |
| 7169235 | Cleaning method and polishing apparatus employing such cleaning method | Yutaka Wada, Norio Kimura | 2007-01-30 |
| 7150673 | Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Yoshihiro Mochizuki, Akira Fukuda, Kazuto Hirokawa +1 more | 2006-12-19 |
| 7144520 | Etching method and apparatus | Katsunori Ichiki, Kazuo Yamauchi, Seiji Samukawa | 2006-12-05 |
| RE39262 | Polishing apparatus including turntable with polishing surface of different heights | Masayoshi Hirose, Yoshimi Sasaki, Akira Ogata, Seiji Ishikawa, Tamami Takahashi +1 more | 2006-09-05 |
| 7078862 | Beam source and beam processing apparatus | Akira Fukuda, Akio Shibata, Katsunori Ichiki, Kazuo Yamauchi, Seiji Samukawa | 2006-07-18 |
| 7034285 | Beam source and beam processing apparatus | Katsunori Ichiki, Akio Shibata, Akira Fukuda, Kazuo Yamauchi, Seiji Samukawa | 2006-04-25 |
| 6942548 | Polishing method using an abrading plate | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2005-09-13 |
| 6909087 | Method of processing a surface of a workpiece | Katsunori Ichiki, Kazuo Yamauchi, Seiji Samukawa | 2005-06-21 |
| 6909086 | Neutral particle beam processing apparatus | Seiji Samukawa, Katsunori Ichiki, Kazuo Yamauchi | 2005-06-21 |
| 6861642 | Neutral particle beam processing apparatus | Katsunori Ichiki, Kazuo Yamauchi, Seiji Samukawa | 2005-03-01 |
| 6861643 | Neutral particle beam processing apparatus | Katsunori Ichiki, Kazuo Yamauchi, Seiji Samukawa | 2005-03-01 |
| 6858838 | Neutral particle beam processing apparatus | Katsunori Ichiki, Kazuo Yamauchi, Seiji Samukawa | 2005-02-22 |
| 6849857 | Beam processing apparatus | Katsunori Ichiki, Kazuo Yamauchi, Seiji Samukawa | 2005-02-01 |
| 6752692 | Cleaning method and polishing apparatus employing such cleaning method | Yutaka Wada, Norio Kimura | 2004-06-22 |
| 6712678 | Polishing-product discharging device and polishing device | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2004-03-30 |
| 6672945 | Polishing apparatus and dressing method | Hisanori Matsuo, Yutaka Wada, Kazuto Hirokawa | 2004-01-06 |
| 6626739 | Polishing method and polishing apparatus | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2003-09-30 |
| 6609950 | Method for polishing a substrate | Norio Kimura, Yu Ishii, Katsuya Okumura, Hiroyuki Yano | 2003-08-26 |