Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062563 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Toru Maruyama, Nobuyuki Takahashi | 2024-08-13 |
| 11951588 | Optical film-thickness measuring apparatus and polishing apparatus | Masaki Kinoshita, Toshifumi Kimba, Yoshikazu Kato | 2024-04-09 |
| 11911867 | Polishing apparatus and polishing method | Toshifumi Kimba, Masaki Kinoshita | 2024-02-27 |
| 11833636 | Substrate polishing apparatus, method of creating thickness map, and method of polishing a substrate | Katsuhide Watanabe, Keita Yagi, Akira Nakamura | 2023-12-05 |
| 11759913 | Polishing method and polishing apparatus | Keita Yagi, Toshimitsu Sasaki, Yuki Watanabe, Nachiketa CHAUHAN | 2023-09-19 |
| 11495475 | Method of cleaning a substrate | Koji Maeda, Hiroshi Shimomoto, Hisajiro Nakano, Masayoshi Imai | 2022-11-08 |
| 11450544 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Toru Maruyama, Nobuyuki Takahashi | 2022-09-20 |
| 10665487 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Toru Maruyama, Nobuyuki Takahashi | 2020-05-26 |
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Suguru Sakugawa, Toru Maruyama, Nobuyuki Takahashi, Zhongxin Wen, Keita Yagi +2 more | 2020-02-11 |
| 10399203 | Polishing method and polishing apparatus | Yoichi Kobayashi, Keita Yagi, Masaki Kinoshita | 2019-09-03 |
| 10056277 | Polishing method | Yoichi Kobayashi, Katsuhide Watanabe | 2018-08-21 |
| 9999955 | Polishing apparatus and polished-state monitoring method | Yoichi Kobayashi, Katsuhide Watanabe, Keita Yagi, Masaki Kinoshita | 2018-06-19 |
| 9550269 | Polishing device and polishing method | Keita Yagi, Yoichi Kobayashi | 2017-01-24 |
| 8965555 | Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus | Akira Fukuda, Yoshihiro Mochizuki, Yutaka Wada, Hirokuni Hiyama | 2015-02-24 |
| 8845391 | Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatus | Tadakazu Sone, Yasuyuki Motoshima, Toru Maruyama, Katsutoshi Ono | 2014-09-30 |
| 8655478 | Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus | Akira Fukuda, Yoshihiro Mochizuki, Yutaka Wada, Hirokuni Hiyama | 2014-02-18 |
| 8360817 | Polishing apparatus and polishing method | Yu Ishii, Jyoji Heianna, Hisanori Matsuo | 2013-01-29 |