Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12257666 | Surface height measurement method using dummy disk | Hiroyuki Shinozaki | 2025-03-25 |
| 12181345 | Method of calibrating radiation thermometer and system thereof | Shuji Uozumi | 2024-12-31 |
| 12023777 | Temperature regulating apparatus and polishing apparatus | Keisuke Kamiki, Toru Maruyama | 2024-07-02 |
| 11958161 | Polishing apparatus having surface-property measuring device of polishing pad and polishing system | Keisuke Kamiki, Toru Maruyama | 2024-04-16 |
| 11897080 | Polishing apparatus | Masashi KABASAWA, Hisanori Matsuo, Keisuke Kamiki | 2024-02-13 |
| 11839947 | Pad-temperature regulating apparatus, and polishing apparatus | Keisuke Kamiki, Toru Maruyama | 2023-12-12 |
| 11577357 | Temperature adjusting device and polishing device | — | 2023-02-14 |
| 11517940 | Substrate cleaning device | Shuji Uozumi, Toru Maruyama | 2022-12-06 |
| 11383345 | Cleaning apparatus for heat exchanger and polishing apparatus | Toru Maruyama, Keisuke Kamiki, Shuji Uozumi | 2022-07-12 |
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Shinji Kajita, Hisajiro Nakano, Tomoatsu Ishibashi, Koichi Fukaya, Yohei Eto +1 more | 2021-08-17 |
| 10710208 | Polishing method and polishing apparatus | Toru Maruyama, Hisanori Matsuo | 2020-07-14 |
| 10475691 | Substrate transfer hand | Toru Maruyama, Yohei Eto | 2019-11-12 |
| 10414018 | Apparatus and method for regulating surface temperature of polishing pad | Toru Maruyama, Hisanori Matsuo, Yohei Eto, Mitsunori Komatsu | 2019-09-17 |
| 10259098 | Method and apparatus for polishing a substrate | Toru Maruyama, Hisanori Matsuo | 2019-04-16 |
| 10195712 | Polishing method and polishing apparatus | Toru Maruyama, Hisanori Matsuo | 2019-02-05 |
| 10099340 | Polishing apparatus including pad contact member with baffle in liquid flow path therein | — | 2018-10-16 |
| 10035238 | Polishing method and polishing apparatus | Toru Maruyama, Hisanori Matsuo | 2018-07-31 |
| 9969046 | Method and apparatus for polishing a substrate | Toru Maruyama, Hisanori Matsuo | 2018-05-15 |
| 9782870 | Polishing method and polishing apparatus | Toru Maruyama, Hisanori Matsuo | 2017-10-10 |
| 9579768 | Method and apparatus for polishing a substrate | Toru Maruyama, Hisanori Matsuo | 2017-02-28 |
| 9561575 | Adjusting a substrate polishing condition | Toru Maruyama | 2017-02-07 |
| 9475167 | Polishing apparatus having temperature regulator for polishing pad | Toru Maruyama, Tadakazu Sone | 2016-10-25 |
| 9233448 | Adjusting a substrate polishing condition | Toru Maruyama | 2016-01-12 |
| 8845391 | Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatus | Tadakazu Sone, Toru Maruyama, Katsutoshi Ono, Yoichi Shiokawa | 2014-09-30 |
| 8777198 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Seiji Katsuoka, Naoki Dai, Teruyuki Watanabe, Takahiro Ogawa +3 more | 2014-07-15 |