Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380559 | Carrier device, work processing apparatus, control method of carrier device and storage medium storing program | Junji Kunisawa, Teruaki HOMBO, Keiji Kanazawa | 2022-07-05 |
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Shinji Kajita, Hisajiro Nakano, Tomoatsu Ishibashi, Koichi Fukaya, Yasuyuki Motoshima +1 more | 2021-08-17 |
| 10589398 | Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program | Toru Maruyama | 2020-03-17 |
| 10475691 | Substrate transfer hand | Toru Maruyama, Yasuyuki Motoshima | 2019-11-12 |
| 10414018 | Apparatus and method for regulating surface temperature of polishing pad | Toru Maruyama, Hisanori Matsuo, Yasuyuki Motoshima, Mitsunori Komatsu | 2019-09-17 |