Yohei Eto has been granted 5 US patents while listed as an inventor at Ebara . The first was granted in 2019 and the most recent in July 2022. Yohei Eto ranks #907,971 of 4,157,543 US inventors in our database (top 21.8%). Patent records list Yohei Eto in Tokyo, JP.
Patents per Year Patents granted per year, 2019 to 2022 Bar chart with a peak of 2 patents in 2019. peak 2 2019: 2 patents 2019 2020: 1 patents 2020 2021: 1 patents 2021 2022: 1 patents 2022
Issued Patents All Time
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Showing 1–5 of 5 patents
Patent # Title Co-Inventors Date Approx Value ⓘ
11380559 Carrier device, work processing apparatus, control method of carrier device and storage medium storing program Junji Kunisawa , Teruaki HOMBO , Keiji Kanazawa 2022-07-05
$7,280,000
11094548 Apparatus for cleaning substrate and substrate cleaning method Shinji Kajita , Hisajiro Nakano , Tomoatsu Ishibashi , Koichi Fukaya , Yasuyuki Motoshima +1 more 2021-08-17
10589398 Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program Toru Maruyama 2020-03-17
10475691 Substrate transfer hand Toru Maruyama , Yasuyuki Motoshima 2019-11-12
10414018 Apparatus and method for regulating surface temperature of polishing pad Toru Maruyama , Hisanori Matsuo , Yasuyuki Motoshima , Mitsunori Komatsu 2019-09-17