Issued Patents All Time
Showing 1–25 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394639 | Substrate drying device and substrate drying method | — | 2025-08-19 |
| 12033847 | Cleaning module, substrate processing apparatus including cleaning module, and cleaning method | Toshio Mizuno, Yosuke Himori, Erina Baba, Itsuki Kobata | 2024-07-09 |
| 11837477 | Washing device and washing method | — | 2023-12-05 |
| 11817311 | Substrate cleaning method and substrate cleaning apparatus | Hiroshi Ishikawa, Masumi Nishijima | 2023-11-14 |
| 11676827 | Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus | — | 2023-06-13 |
| 11660643 | Substrate cleaning device and substrate cleaning method | — | 2023-05-30 |
| 11642704 | Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these | — | 2023-05-09 |
| 11626299 | Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatus | Yoshitaka Kitagawa, Hisajiro Nakano | 2023-04-11 |
| 11524322 | Jig for attaching and detaching cleaning member | Tomoaki Fujimoto, Shuichi Suemasa | 2022-12-13 |
| 11501983 | Substrate cleaning member and substrate cleaning apparatus | — | 2022-11-15 |
| 11424138 | Substrate cleaning tool, substrate cleaning apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate cleaning tool | — | 2022-08-23 |
| 11180303 | Storage container of scrubbing member and package of same | Hisajiro Nakano | 2021-11-23 |
| 11164758 | Washing device and washing method | — | 2021-11-02 |
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Shinji Kajita, Hisajiro Nakano, Koichi Fukaya, Yasuyuki Motoshima, Yohei Eto +1 more | 2021-08-17 |
| 11081373 | Substrate cleaning apparatus and substrate cleaning method | — | 2021-08-03 |
| 10991602 | Substrate washing device | Koichi Fukaya, Hisajiro Nakano | 2021-04-27 |
| 10892173 | Substrate cleaning roll, substrate cleaning apparatus, and substrate cleaning method | — | 2021-01-12 |
| 10737301 | Substrate cleaning apparatus | — | 2020-08-11 |
| 10625308 | Cleaning device, method of manufacturing the same and substrate cleaning apparatus | — | 2020-04-21 |
| 10471481 | Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these | — | 2019-11-12 |
| 10453708 | Cleaning device and roll cleaning member | — | 2019-10-22 |
| 10395949 | Substrate drying apparatus, storage medium, and substrate drying method | — | 2019-08-27 |
| 10315232 | Cleaning member and substrate cleaning apparatus | — | 2019-06-11 |
| 10192757 | Substrate cleaning apparatus and substrate cleaning method | — | 2019-01-29 |
| 10170344 | Washing device and washing method | — | 2019-01-01 |