Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D710062 | Roller shaft for semiconductor cleaning | Fumitoshi Oikawa, Hideaki Tanaka, Teruaki HOMBO | 2014-07-29 |
| 8769842 | Substrate drying apparatus, substrate drying method and control program | Takahiro Ogawa, Kenichi Sugita, Shinji Kajita, Koichi Fukaya, Akira Nakamura | 2014-07-08 |
| D707408 | Roller for semiconductor wafer cleaning | — | 2014-06-17 |