Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372997 | Processing device and error detection method | Hideyuki Oguri, Takao Yamauchi, Hiroki Mizosoe | 2025-07-29 |
| 10629717 | High power device | — | 2020-04-21 |
| 10008380 | Substrate drying apparatus, substrate drying method and control program | Tomoatsu Ishibashi, Takahiro Ogawa, Shinji Kajita, Koichi Fukaya, Akira Nakamura | 2018-06-26 |
| 8769842 | Substrate drying apparatus, substrate drying method and control program | Tomoatsu Ishibashi, Takahiro Ogawa, Shinji Kajita, Koichi Fukaya, Akira Nakamura | 2014-07-08 |
| 8087419 | Substrate holding rotating mechanism, and substrate processing apparatus | Hiroyuki Kaneko, Takahiro Ogawa | 2012-01-03 |
| 7938130 | Substrate holding rotating mechanism, and substrate processing apparatus | Hiroyuki Kaneko, Takahiro Ogawa | 2011-05-10 |
| 6143732 | Sesquiterpene derivatives | Naohiko Hattori | 2000-11-07 |