Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370578 | Substrate cleaning apparatus and substrate cleaning method | Fumitoshi Oikawa, Mitsuru Miyazaki | 2025-07-29 |
| 12220732 | Substrate cleaning system and substrate cleaning method | Hiroki Takahashi, Kohei Sato | 2025-02-11 |
| 12205831 | Cleaning apparatus and polishing apparatus | Mitsuru Miyazaki, Tomoaki Fujimoto, Fumitoshi Oikawa, Takuya Inoue | 2025-01-21 |
| 12100587 | Substrate cleaning apparatus and cleaning method of substrate | Fumitoshi Oikawa, Tomoaki Fujimoto, Mitsuru Miyazaki | 2024-09-24 |
| 11948811 | Cleaning apparatus and polishing apparatus | Mitsuru Miyazaki, Tomoaki Fujimoto, Fumitoshi Oikawa, Takuya Inoue | 2024-04-02 |
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Shinji Kajita, Hisajiro Nakano, Tomoatsu Ishibashi, Yasuyuki Motoshima, Yohei Eto +1 more | 2021-08-17 |
| 10991602 | Substrate washing device | Tomoatsu Ishibashi, Hisajiro Nakano | 2021-04-27 |
| 10008380 | Substrate drying apparatus, substrate drying method and control program | Tomoatsu Ishibashi, Takahiro Ogawa, Kenichi Sugita, Shinji Kajita, Akira Nakamura | 2018-06-26 |
| 8769842 | Substrate drying apparatus, substrate drying method and control program | Tomoatsu Ishibashi, Takahiro Ogawa, Kenichi Sugita, Shinji Kajita, Akira Nakamura | 2014-07-08 |
| 7988537 | Substrate holding apparatus and polishing apparatus | Tetsuji Togawa, Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima | 2011-08-02 |
| 7867063 | Substrate holding apparatus and polishing apparatus | Tetsuji Togawa, Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima | 2011-01-11 |
| 7854646 | Substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Mitsuo Tada, Taro Takahashi, Yasunari Suto | 2010-12-21 |
| 7670206 | Substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Mitsuo Tada, Taro Takahashi, Yasunari Suto | 2010-03-02 |
| 7638030 | Electrolytic processing apparatus and electrolytic processing method | Osamu Nabeya, Masayuki Kumekawa, Hozumi Yasuda, Itsuki Kobata, Takeshi Iizumi +7 more | 2009-12-29 |
| 7635292 | Substrate holding device and polishing apparatus | Tetsuji Togawa, Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima | 2009-12-22 |
| 7357699 | Substrate holding apparatus and polishing apparatus | Tetsuji Togawa, Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima | 2008-04-15 |
| 7108592 | Substrate holding apparatus and polishing apparatus | Tetsuji Togawa, Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima | 2006-09-19 |
| 4364169 | Method of producing a stator iron core | Kenzi Kawano, Keizou Jyoko | 1982-12-21 |