| 10134614 |
Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus |
Mitsuo Tada, Hirofumi Ichihara, Kenya Ito, Tamami Takahashi |
2018-11-20 |
| 7854646 |
Substrate polishing apparatus and substrate polishing method |
Tetsuji Togawa, Koichi Fukaya, Mitsuo Tada, Taro Takahashi |
2010-12-21 |
| 7714572 |
Method of detecting characteristics of films using eddy current |
Mitsuo Tada, Hironobu Yamasaki |
2010-05-11 |
| 7670206 |
Substrate polishing apparatus and substrate polishing method |
Tetsuji Togawa, Koichi Fukaya, Mitsuo Tada, Taro Takahashi |
2010-03-02 |
| 7508201 |
Eddy current sensor |
Mitsuo Tada |
2009-03-24 |
| 7078894 |
Polishing device using eddy current sensor |
Mitsuo Tada, Hironobu Yamasaki |
2006-07-18 |
| 7046001 |
Frequency measuring device, polishing device using the same and eddy current sensor |
Mitsuo Tada, Hironobu Yamasaki |
2006-05-16 |
| 6935935 |
Measuring apparatus |
Mitsuo Tada |
2005-08-30 |
| 6746319 |
Measuring apparatus |
Mitsuo Tada |
2004-06-08 |