Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134614 | Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus | Mitsuo Tada, Yasunari Suto, Kenya Ito, Tamami Takahashi | 2018-11-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134614 | Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus | Mitsuo Tada, Yasunari Suto, Kenya Ito, Tamami Takahashi | 2018-11-20 |