| 10933507 |
Polishing apparatus |
Taro Takahashi, Akira Nakamura, Hiroaki Shibue |
2021-03-02 |
| 10739488 |
Metal detection sensor and metal detection method using same |
Taro Takahashi |
2020-08-11 |
| 10134614 |
Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus |
Yasunari Suto, Hirofumi Ichihara, Kenya Ito, Tamami Takahashi |
2018-11-20 |
| 9632061 |
Eddy current sensor and polishing method |
Taro Takahashi |
2017-04-25 |
| 9437507 |
Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor |
Akira Nakamura, Hiroaki Shibue, Yasumasa Hiroo, Hiroshi Ota, Taro Takahashi |
2016-09-06 |
| 8696924 |
Polishing apparatus and polishing method |
Taro Takahashi, Motohiro Niijima, Shinro Ohta, Atsushi Shigeta |
2014-04-15 |
| 8657644 |
Eddy current sensor and polishing method and apparatus |
Taro Takahashi |
2014-02-25 |
| 7960188 |
Polishing method |
Shinrou Ohta, Noburu Shimizu, Yoichi Kobayashi, Taro Takahashi, Eisaku Hayashi +3 more |
2011-06-14 |
| 7854646 |
Substrate polishing apparatus and substrate polishing method |
Tetsuji Togawa, Koichi Fukaya, Taro Takahashi, Yasunari Suto |
2010-12-21 |
| 7714572 |
Method of detecting characteristics of films using eddy current |
Hironobu Yamasaki, Yasunari Suto |
2010-05-11 |
| 7670206 |
Substrate polishing apparatus and substrate polishing method |
Tetsuji Togawa, Koichi Fukaya, Taro Takahashi, Yasunari Suto |
2010-03-02 |
| 7508201 |
Eddy current sensor |
Yasunari Suto |
2009-03-24 |
| 7258595 |
Polishing apparatus |
Kazuo Shimizu |
2007-08-21 |
| 7078894 |
Polishing device using eddy current sensor |
Hironobu Yamasaki, Yasunari Suto |
2006-07-18 |
| 7046001 |
Frequency measuring device, polishing device using the same and eddy current sensor |
Hironobu Yamasaki, Yasunari Suto |
2006-05-16 |
| 6935935 |
Measuring apparatus |
Yasunari Suto |
2005-08-30 |
| 6746319 |
Measuring apparatus |
Yasunari Suto |
2004-06-08 |
| 6517689 |
Plating device |
Akihisa Hongo, Kenichi Suzuki, Atsushi Chono, Akira Ogata, Satoshi Sendai +1 more |
2003-02-11 |
| 6500317 |
Plating apparatus for detecting the conductivity between plating contacts on a substrate |
Junichiro Yoshioka, Satoshi Sendai, Atsushi Chono, Akihisa Hongo, Yoshitaka Mukaiyama +4 more |
2002-12-31 |
| 4375917 |
Single-chip, MOS-LSI microprocessor controlled electrophotographic copying machine |
Shizuka Hiraike, Yukihiro Yoshida, Shintaro Hashimoto, Toshio Yamagishi |
1983-03-08 |
