Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10933507 | Polishing apparatus | Taro Takahashi, Akira Nakamura, Hiroaki Shibue | 2021-03-02 |
| 10739488 | Metal detection sensor and metal detection method using same | Taro Takahashi | 2020-08-11 |
| 10134614 | Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus | Yasunari Suto, Hirofumi Ichihara, Kenya Ito, Tamami Takahashi | 2018-11-20 |
| 9632061 | Eddy current sensor and polishing method | Taro Takahashi | 2017-04-25 |
| 9437507 | Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor | Akira Nakamura, Hiroaki Shibue, Yasumasa Hiroo, Hiroshi Ota, Taro Takahashi | 2016-09-06 |
| 8696924 | Polishing apparatus and polishing method | Taro Takahashi, Motohiro Niijima, Shinro Ohta, Atsushi Shigeta | 2014-04-15 |
| 8657644 | Eddy current sensor and polishing method and apparatus | Taro Takahashi | 2014-02-25 |
| 7960188 | Polishing method | Shinrou Ohta, Noburu Shimizu, Yoichi Kobayashi, Taro Takahashi, Eisaku Hayashi +3 more | 2011-06-14 |
| 7854646 | Substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Koichi Fukaya, Taro Takahashi, Yasunari Suto | 2010-12-21 |
| 7714572 | Method of detecting characteristics of films using eddy current | Hironobu Yamasaki, Yasunari Suto | 2010-05-11 |
| 7670206 | Substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Koichi Fukaya, Taro Takahashi, Yasunari Suto | 2010-03-02 |
| 7508201 | Eddy current sensor | Yasunari Suto | 2009-03-24 |
| 7258595 | Polishing apparatus | Kazuo Shimizu | 2007-08-21 |
| 7078894 | Polishing device using eddy current sensor | Hironobu Yamasaki, Yasunari Suto | 2006-07-18 |
| 7046001 | Frequency measuring device, polishing device using the same and eddy current sensor | Hironobu Yamasaki, Yasunari Suto | 2006-05-16 |
| 6935935 | Measuring apparatus | Yasunari Suto | 2005-08-30 |
| 6746319 | Measuring apparatus | Yasunari Suto | 2004-06-08 |
| 6517689 | Plating device | Akihisa Hongo, Kenichi Suzuki, Atsushi Chono, Akira Ogata, Satoshi Sendai +1 more | 2003-02-11 |
| 6500317 | Plating apparatus for detecting the conductivity between plating contacts on a substrate | Junichiro Yoshioka, Satoshi Sendai, Atsushi Chono, Akihisa Hongo, Yoshitaka Mukaiyama +4 more | 2002-12-31 |
| 4375917 | Single-chip, MOS-LSI microprocessor controlled electrophotographic copying machine | Shizuka Hiraike, Yukihiro Yoshida, Shintaro Hashimoto, Toshio Yamagishi | 1983-03-08 |