Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420378 | Substrate processing apparatus and method for controlling dressing of polishing member | Keita Yagi | 2025-09-23 |
| 11945075 | Polishing apparatus and polishing member dressing method | Keita Yagi | 2024-04-02 |
| 11458589 | Polishing apparatus and polishing member dressing method | Keita Yagi | 2022-10-04 |
| 10828747 | Substrate polishing apparatus and method | Keita Yagi | 2020-11-10 |
| 9440327 | Polishing apparatus and polishing method | Yoichi Kobayashi, Katsutoshi Ono | 2016-09-13 |
| 9437507 | Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor | Akira Nakamura, Hiroaki Shibue, Hiroshi Ota, Taro Takahashi, Mitsuo Tada | 2016-09-06 |
| 8398456 | Polishing method, polishing apparatus and method of monitoring a substrate | Yoichi Kobayashi | 2013-03-19 |
| 8246417 | Polishing apparatus and polishing method | Yoichi Kobayashi, Tsuyoshi Ohashi | 2012-08-21 |
| 8112169 | Polishing apparatus and polishing method | Yoichi Kobayashi, Tsuyoshi Ohashi | 2012-02-07 |
| 8078419 | Polishing monitoring method and polishing apparatus | Yoichi Kobayashi, Taro Takahashi, Akihiko Ogawa, Shinrou Ohta | 2011-12-13 |
| 7822500 | Polishing apparatus and polishing method | Yoichi Kobayashi, Tsuyoshi Ohashi | 2010-10-26 |
| 7313452 | Substrate transfer controlling apparatus and substrate transferring method | Yoichi Kobayashi, Tsuyoshi Ohashi | 2007-12-25 |
| 7072730 | Substrate transfer controlling apparatus and substrate transferring method | Yoichi Kobayashi, Tsuyoshi Ohashi | 2006-07-04 |
| 6772029 | Wafer transfer control apparatus and method for transferring wafer | Yoichi Kobayashi, Tsuyoshi Ohashi | 2004-08-03 |