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Polishing monitoring method, polishing apparatus and monitoring apparatus |
Taro Takahashi, Yoichi Kobayashi, Akihiko Ogawa |
2015-06-30 |
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Polishing endpoint detection method |
Atsushi Shigeta |
2014-07-15 |
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Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method and apparatus for selecting wavelength of light for polishing endpoint detection, polishing endpoint detection method, polishing endpoint detection apparatus, and polishing monitoring method |
Yoichi Kobayashi, Toshifumi Kimba, Masaki Kinoshita |
2013-11-19 |
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Polishing endpoint detection apparatus |
Atsushi Shigeta |
2013-10-29 |
| 8388408 |
Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing endpoint detection method |
Yoichi Kobayashi, Noburu Shimizu |
2013-03-05 |
| 8157616 |
Polishing end point detection method |
Noburu Shimizu |
2012-04-17 |
| 8078419 |
Polishing monitoring method and polishing apparatus |
Yoichi Kobayashi, Taro Takahashi, Yasumasa Hiroo, Akihiko Ogawa |
2011-12-13 |
| 7960188 |
Polishing method |
Mitsuo Tada, Noburu Shimizu, Yoichi Kobayashi, Taro Takahashi, Eisaku Hayashi +3 more |
2011-06-14 |
| 7780503 |
Polishing apparatus and polishing method |
Noburu Shimizu, Yoichi Kobayashi |
2010-08-24 |
| 7547242 |
Substrate polishing apparatus |
Kazuto Hirokawa, Yoichi Kobayashi, Shunsuke Nakai, Yasuo Tsukuda |
2009-06-16 |
| 7507144 |
Substrate polishing apparatus |
Kazuto Hirokawa, Shunsuke Nakai, Yutaka Wada, Yoichi Kobayashi |
2009-03-24 |
| 7214122 |
Substrate polishing apparatus |
Kazuto Hirokawa, Shunsuke Nakai, Yutaka Wada, Yoichi Kobayashi |
2007-05-08 |