Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11472001 | Elastic membrane and substrate holding apparatus | Cheng Cheng, Shingo Togashi, Makoto Fukushima | 2022-10-18 |
| 8133380 | Method for regenerating ion exchanger | Takayuki Saito, Tsukuru Suzuki, Yuji Makita, Kaoru Yamada, Masayuki Kumekawa +5 more | 2012-03-13 |
| 8002607 | Polishing apparatus and polishing method | Akira Fukuda, Yoshihiro Mochizuki | 2011-08-23 |
| 7976358 | Polishing apparatus and polishing method | Akira Fukuda, Yoshihiro Mochizuki | 2011-07-12 |
| 7967660 | Polishing apparatus and polishing method | Akira Fukuda, Yoshihiro Mochizuki | 2011-06-28 |
| 7578920 | Electrolytic processing method | Ikutaro Noji, Hozumi Yasuda, Takeshi Iizumi, Itsuki Kobata | 2009-08-25 |
| 7547242 | Substrate polishing apparatus | Yoichi Kobayashi, Shunsuke Nakai, Shinrou Ohta, Yasuo Tsukuda | 2009-06-16 |
| 7507144 | Substrate polishing apparatus | Shunsuke Nakai, Shinrou Ohta, Yutaka Wada, Yoichi Kobayashi | 2009-03-24 |
| 7476303 | Electrolytic processing apparatus and electrolytic processing method | Hozumi Yasuda, Ikutaro Noji, Takeshi Iizumi, Itsuki Kobata | 2009-01-13 |
| 7427345 | Method and device for regenerating ion exchanger, and electrolytic processing apparatus | Takayuki Saito, Tsukuru Suzuki, Yuji Makita, Kaoru Yamada, Masayuki Kumekawa +5 more | 2008-09-23 |
| 7361076 | Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Yoshihiro Mochizuki, Akira Fukuda, Hirokuni Hiyama +1 more | 2008-04-22 |
| 7234999 | Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Yoshihiro Mochizuki, Akira Fukuda, Hirokuni Hiyama +1 more | 2007-06-26 |
| 7214122 | Substrate polishing apparatus | Shunsuke Nakai, Shinrou Ohta, Yutaka Wada, Yoichi Kobayashi | 2007-05-08 |
| 7150673 | Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Yoshihiro Mochizuki, Akira Fukuda, Hirokuni Hiyama +1 more | 2006-12-19 |
| 7101257 | Substrate polishing apparatus | Yoichi Kobayashi, Shunsuke Nakai, Shinro Ohta, Yasuo Tsukuda | 2006-09-05 |
| 6942548 | Polishing method using an abrading plate | Yutaka Wada, Hirokuni Hiyama, Hisanori Matsuo | 2005-09-13 |
| 6899592 | Polishing apparatus and dressing method for polishing tool | Shunichiro Kojima, Akira Kodera | 2005-05-31 |
| 6866565 | Polishing tool and polishing apparatus | Hiroshi Sakabe | 2005-03-15 |
| 6712678 | Polishing-product discharging device and polishing device | Yutaka Wada, Hirokuni Hiyama, Hisanori Matsuo | 2004-03-30 |
| 6672945 | Polishing apparatus and dressing method | Hisanori Matsuo, Hirokuni Hiyama, Yutaka Wada | 2004-01-06 |
| 6626739 | Polishing method and polishing apparatus | Yutaka Wada, Hirokuni Hiyama, Hisanori Matsuo | 2003-09-30 |
| 6595831 | Method for polishing workpieces using fixed abrasives | Hirokuni Hiyama, Yutaka Wada, Hisanori Matsuo, Noburu Shimizu | 2003-07-22 |
| 6579148 | Polishing apparatus | Hirokuni Hiyama, Yutaka Wada, Hisanori Matsuo, Tetsuji Togawa | 2003-06-17 |
| 6520845 | Polishing apparatus | Hirokuni Hiyama, Yutaka Wada, Hisanori Matsuo | 2003-02-18 |
| 6458012 | Polishing apparatus | Hirokuni Hiyama, Yutaka Wada, Hisanori Matsuo, Tetsuji Togawa | 2002-10-01 |