Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7850509 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more | 2010-12-14 |
| 7491117 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more | 2009-02-17 |
| 7156725 | Substrate polishing machine | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more | 2007-01-02 |
| 7083507 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more | 2006-08-01 |
| 6899592 | Polishing apparatus and dressing method for polishing tool | Kazuto Hirokawa, Akira Kodera | 2005-05-31 |
| 6899604 | Dressing apparatus and polishing apparatus | Tetsuji Togawa, Ikutaro Noji, Nobuyuki Takada | 2005-05-31 |
| 6852019 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more | 2005-02-08 |
| 6790129 | Method for polishing angular substrates | Jiro Moriya, Masataka Watanabe, Satoshi Okazaki, Hidekazu Ozawa, You Ishii | 2004-09-14 |
| 6435949 | Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof | Seiji Katsuoka, Hozumi Yasuda, Tadakazu Sone, Manabu Tsujimura | 2002-08-20 |
| 6409582 | Polishing apparatus | Tetsuji Togawa, Kuniaki Yamaguchi, Toyomi Nishi | 2002-06-25 |
| 6293858 | Polishing device | Norio Kimura, Toru Maruyama, Seiji Katsuoka, Shin Ohwada | 2001-09-25 |
| 6241592 | Polishing apparatus | Tetsuji Togawa | 2001-06-05 |
| 6050884 | Polishing apparatus | Tetsuji Togawa, Kuniaki Yamaguchi, Toyomi Nishi | 2000-04-18 |
| 5934984 | Polishing apparatus | Tetsuji Togawa | 1999-08-10 |