| 7708618 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device |
Hiromi Yajima, Yukio Imoto, Shoichi Kodama, Riichiro Aoki, Takashi Omichi +1 more |
2010-05-04 |
| 7198552 |
Polishing apparatus |
Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more |
2007-04-03 |
| 6997782 |
Polishing apparatus and a method of polishing and cleaning and drying a wafer |
Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more |
2006-02-14 |
| 6905400 |
Method and apparatus for dressing polishing cloth |
Norio Kimura, You Ishii, Takayoshi Kawamoto, Takeshi Sakurai |
2005-06-14 |
| RE38215 |
Polishing apparatus |
Miki Shibata, Hidetaka Nakao, Tetsuji Togawa |
2003-08-12 |
| 6500051 |
Polishing apparatus and method |
Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more |
2002-12-31 |
| 6413357 |
Polishing apparatus |
Tetsuji Togawa, Seiji Katsuoka, Norio Kimura |
2002-07-02 |
| 6409582 |
Polishing apparatus |
Tetsuji Togawa, Kuniaki Yamaguchi, Shunichiro Kojima |
2002-06-25 |
| 6364752 |
Method and apparatus for dressing polishing cloth |
Norio Kimura, You Ishii, Takayoshi Kawamoto, Takeshi Sakurai |
2002-04-02 |
| 6139677 |
Polishing apparatus |
Tetsuji Togawa, Seiji Katsuoka, Norio Kimura |
2000-10-31 |
| 6074276 |
Polishing apparatus |
Miki Shibata, Hidetaka Nakao, Tetsuji Togawa |
2000-06-13 |
| 6050884 |
Polishing apparatus |
Tetsuji Togawa, Kuniaki Yamaguchi, Shunichiro Kojima |
2000-04-18 |
| 5931723 |
Polishing apparatus |
Seiji Katsuoka, Tetsuji Togawa |
1999-08-03 |
| 5885134 |
Polishing apparatus |
Miki Shibata, Hidetaka Nakao, Tetsuji Togawa |
1999-03-23 |
| 5860847 |
Polishing apparatus |
Kunihiko Sakurai, Tetsuji Togawa, Seiji Katsuoka, Hiromi Yajima, Masako Kodera |
1999-01-19 |
| 5839947 |
Polishing apparatus |
Norio Kimura, Kunihiko Sakurai, Tetsuji Togawa, Seiji Katsuoka |
1998-11-24 |
| 5827110 |
Polishing facility |
Hiromi Yajima, Yukio Imoto, Shoichi Kodama, Riichiro Aoki, Takashi Omichi +1 more |
1998-10-27 |
| 5704827 |
Polishing apparatus including cloth cartridge connected to turntable |
Manabu Tsujimura, Tamami Takahashi, Hiromi Yajima, Riichiro Aoki, Yukio Imoto +4 more |
1998-01-06 |
| 5679059 |
Polishing aparatus and method |
Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more |
1997-10-21 |
| 5679064 |
Polishing apparatus including detachable cloth cartridge |
Tamami Takahashi, Tetsuji Togawa |
1997-10-21 |
| 5645473 |
Polishing apparatus |
Tetsuji Togawa |
1997-07-08 |
| 5356844 |
Dielectric ceramic composition and dielectric resonator |
Seiichiro Hirahara, Nobuyoshi Fujikawa, Shinichi Enami |
1994-10-18 |
| 5198395 |
Dielectric ceramic composition for high frequency use |
Hideki Utaki, Nobuyoshi Fujikawa |
1993-03-30 |
